JEOL JEM-2100F, Инструкция по эксплуатации

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EM210F-1
5.3 METHOD B......................................................................................................5-25
5.3.1 Conditions for High Resolution Microscopy............................................5-25
5.3.2 Illumination System Alignment................................................................5-28
5.3.3 Condenser Lens Astigmatism Correction.................................................5-29
5.3.4 Beam Deflector Adjustment .....................................................................5-29
5.3.4a Tilt adjustment...................................................................................5-29
5.3.4b Shift adjustment.................................................................................5-30
5.3.5 Voltage/current Center Adjustment ..........................................................5-30
5.3.5a Current center adjustment..................................................................5-31
5.3.5b Voltage center adjustment..................................................................5-31
5.3.6 Objective Lens Astigmatism Correction ..................................................5-32
5.3.6a At Middle Magnifications .................................................................5-32
5.3.6b At High Magnifications.....................................................................5-33
5.3.7 Image Focusing.........................................................................................5-34
5.3.7a Using Image Wobbler........................................................................5-34
5.3.7b Using Fresnel Fringe..........................................................................5-36
5.3.8 Focusing with Fine Structure....................................................................5-37
5.4 SPECIAL OBSERVATION ..............................................................................5-38
5.4.1 Bright Field Image....................................................................................5-38
5.4.2 Dark Field Image ......................................................................................5-38
5.4.3 Low Magnification Image ........................................................................5-39
5.4.3a Low magnification image observation ..............................................5-39
5.4.3b Current center adjustment..................................................................5-39
5.4.3c Astigmatism Correction.....................................................................5-40
5.4.4 Minimum Dose Exposure (MDS).............................................................5-41
5.5 ELECTRON DIFFRACTION ..........................................................................5-43
5.5.1 Selected Area Diffraction .........................................................................5-43
5.5.2 Microbeam Electron Diffraction...............................................................5-44
5.5.3 High Dispersion Electron Diffraction.......................................................5-45
5.6 USE OF THE ANTICONTAMINATION DEVICE.........................................5-47
5.6.1 Filling the Refrigerant Tank......................................................................5-47
5.6.2 Raising the Trap Temperature to Room Temperature................................5-48
5.7 SPECIAL OPERATION ...................................................................................5-51
5.7.1 Alignment Data Saving.............................................................................5-51
5.7.1a Saving................................................................................................5-51
5.7.1b File Reading.......................................................................................5-51
5.7.2 Free Lens Control (FLC) ..........................................................................5-52
5.8 APPENDIX.......................................................................................................5-53
5.8.1 Microscope Console and Column.............................................................5-53
5.8.2 Objective Aperture....................................................................................5-54
5.8.2a UHR, HR and HT configurations......................................................5-54
5.8.2b CR and HC configurations ................................................................5-54
5.8.3 Vacuum Pumps .........................................................................................5-54
5.8.3a EM-23075 evacuation system ...........................................................5-54
5.8.3b EM-23078 evacuation system ...........................................................5-54
5.8.3c EM-23080 evacuation system ...........................................................5-55
5.8.3d EM-23085 evacuation system ...........................................................5-55