4 DESCRIPTION OF CONTROLS
4-4
EM210F-1
·
Aperture number select switches
When one of these switches is depressed, the corresponding aperture size of the
selected aperture assembly is selected.
OPEN:
The aperture is opened.
1:
Aperture number 1 is selected.
2:
Aperture number 2 is selected.
3:
Aperture number 3 is selected.
4:
Aperture number 4 is selected.
·
X, Y shift switches
Used to shift the aperture in the X and Y directions.
·
CRS switch
Depressing this switch multiplies the amount of the aperture shift when one of the
X, Y switches is depressed by 16 times.
③
PROBE CONTROL
·
Illumination mode select switches (TEM, EDS, NBD and CBD)
TEM switch:
When this is turned on, the built-in lamp brightens and the
illumination mode is set to the TEM mode (wide area illumina-
tion mode).
EDS switch:
When this is turned on, the built-in lamp brightens and the
illumination mode is set to the EDS mode (high current density
micro-area illumination mode).
NBD switch:
When this is turned on, the built-in lamp brightens and the
illumination mode is set to the NBD mode (small convergence
angle micro-area illumination mode).
CBD switch:
When this is turned on, the built-in lamp brightens and the
illumination mode is set to the CBD mode (wide range
chargeable convergence angle micro-area illumination mode).
· a
SELECTOR knob
Selects the convergent angle with the illuminating area kept unchanged in size.
The CM lens current decreases and illuminating angle becomes larger as this is
turned clockwise. The CM lens current decreases to zero when this is turned fully
clockwise.
·
SPOT SIZE knob
Turning this switch one step increases or decreases the spot size (the size of the
electron beam when converged minimally using the BRIGHTNESS knob). The
SPOT SIZE number increases when the spot size is decreased and the SPOT SIZE
number decreases when the spot size is increased.
④
ROOM LAMP switch
Used to turn on and off the room lamp when provided.
⑤
DEF/STIG switches
Depressing one of these witches lights up the built-in lamp and the selected coil
current can be controlled with the SHIFT knobs (L1-
⑦
, R1-
⑤
) or DEF/STIG
knobs (L1-
⑨
, R1-
⑤
). Depressing the switch again turned off the built-in lamp and
the selected coil current is fixed to the value when this switch is depressed (the
built-in lamp goes out).
IMAGE SHIFT switch: Used for image shift at high magnifications.
