CONTENTS
C-2
EM210F-1
4.2.4
Control Panel R2..............................................................................4-9
4.2.5
Control Panel SC ...........................................................................4-10
4.2.6
Power Supply Console...................................................................4-11
4.3
MONITOR DISPLAY ..........................................................................4-14
4.3.1
Page 1 ............................................................................................4-14
4.3.2
Page 2 ............................................................................................4-15
4.3.3
Page 3 ............................................................................................4-16
4.3.4
Page 4 ............................................................................................4-16
4.3.5
Page 5 ............................................................................................4-17
4.4
PC SCREENS.......................................................................................4-18
4.4.1
Application Start-up ......................................................................4-18
4.4.2
TEM Controller Screen .................................................................4-19
4.4.3
Switches.........................................................................................4-19
4.4.4
Main Screen...................................................................................4-20
4.4.5
Menu Bar.......................................................................................4-22
4.4.6
Screens from the Menu Bar...........................................................4-24
4.4.7
Emergency Screen .........................................................................4-45
5.1
EMERGENCIES ....................................................................................5-1
5.1.1
Power Suspension............................................................................5-1
5.1.2
Cooling Water Suspension...............................................................5-1
5.1.3
Faulty Operation ..............................................................................5-1
5.2
METHOD A ...........................................................................................5-2
5.2.1
Startup Procedure ............................................................................5-2
5.2.2
Shut Down Procedure......................................................................5-2
5.2.3
Film Loading ...................................................................................5-2
5.2.4
Electron Beam Generation...............................................................5-8
5.2.5
Aperture Insertion..........................................................................5-15
5.2.6
Photographing................................................................................5-17
5.2.7
Image Observation.........................................................................5-20
5.2.8
Film Processing .............................................................................5-22
5.3
METHOD B..........................................................................................5-25
5.3.1
Conditions for High Resolution Microscopy.................................5-25
5.3.2
Illumination System Alignment.....................................................5-28
5.3.3
Condenser Lens Astigmatism Correction......................................5-29
5.3.4
Beam Deflector Adjustment ..........................................................5-29
5.3.5
Voltage/current Center Adjustment ...............................................5-30
5.3.6
Objective Lens Astigmatism Correction .......................................5-32
5.3.7
Image Focusing..............................................................................5-34
5.3.8
Focusing with Fine Structure.........................................................5-37
5.4
SPECIAL OBSERVATION ..................................................................5-38
5.4.1
Bright Field Image.........................................................................5-38
5.4.2
Dark Field Image...........................................................................5-38
5.4.3
Low Magnification Image .............................................................5-39
5.4.4
Minimum Dose Exposure (MDS)..................................................5-41
5.5
ELECTRON DIFFRACTION ..............................................................5-43
5.5.1
Selected Area Diffraction ..............................................................5-43
5.5.2
Microbeam Electron Diffraction ...................................................5-44
