5 OPERATION
5-14
EM210F-1
7.
Make sure that the filament current is the specified value (the same value as
that corresponds to the 1800K of the filament temperature).
If not, carry out Step 3 above to obtain the specified value.
The present data is stored in the memory by setting all the “Save to memory”
buttons.
The present data is stored in the memory by pressing the “Standard” button.
Fig. 5.12 Emitter temperature setting
5.2.4g Beam generation stopping it manual mode
This operation should be performed under the directions from a JEOL service office.
1.
Close isolation valve V1.
2.
Minimize the value on the “Monitor” of “A1…” using the triangle buttons.
?
The 1
st
anode voltage is set to 0.
3.
Minimize the value on the “Monitor” of “A2…” using the triangle buttons.
?
The 2
nd
anode voltage is set to 0.
4.
Minimize the value on the “Monitor” of “Bias…” using the triangle buttons.
?
The bias voltage is set to 0.
5.
Minimize the value on the “Monitor” of “Filament…” using the triangle buttons.
?
The filament current is set to 0.
6.
Set the “Emission” on the “High Voltage Control” screen to OFF.
7.
Set the “Step” value on the screen to 1 kV.
8.
Set the value to 100 kV using the UP/DOWN buttons on the screen.
