5 OPERATION
5-42
EM210F-1
3.
Set the PHOTO SET mode.
a.
Select “Photo Set” on the MDS screen.
b.
Set the image brightness, magnification and photographing condition.
?
Generally, the electron beam is converged and the field of view is narrowed as
much as possible and the manual exposure mode is used for photographing in
this mode.
4.
Set the SEARCH mode.
a.
Select “search” on the MDS screen.
b.
Set the image brightness, magnification and photographing condition for
field searching.
?
Generally, a low magnification is selected, the electron beam is diverged to
make the beam density on the screen minimum and the manual exposure mode
is used for photographing in this mode.
c.
Select the DIFF mode.
?
A low magnification image appears when the DIFF FOCUS is shifted largely
after diverging the beam as much as possible.
5.
Set the FOCUS mode.
a.
Select “Focus” on the MDS screen.
b.
Set the focusing condition.
?
The magnification higher than that used for in the PHOTO SET mode is
selected. The beam should be converged as much as possible (converged to the
area where the image focusing is narrowly carried out).
6.
Repeat the condition setting in the SEARCH
→
FOCUS
→
PHOTO SET modes
in this order to make the beam deviation minimum.
7.
Select “Focus” on the MDS screen to obtain the FOCUS mode.
8.
Depress the IMAGE SHIFT switch (L1-
⑤
) or “DEF Select-IS1” on the
“Alignment Panel for Maintenance” screen.
9.
Bring the electron beam to the position where image focusing is performed
using the SHIFT knobs (L1-
⑧
, R1-
③
).
10.
Bring the field of view for focusing to the screen center using the DEF/STIG
knobs.
?
The field of view for focusing should not overlap the field of view for beam
illumination area selected in the PHOTO SET mode.
11.
Make sure that the condition in each mode is correctly set.
12.
Search the field of view to be photographed in the SEARCH mode.
13.
Focus the image in the FOCUS mode.
14.
Carry out photographing.
a.
Depress the PHOTO switch (R1-
⑧
).
The PHOTO mode is automatically selected and photographing is performed. The
“After Photo” mode is automatically selected after completion of the photographing.
b.
Select “OFF on the MDS screen to obtain the conventional photographing
mode.
