5 OPERATION
EM210F-1
5-1
This chapter describes the operation procedures up to and including image recording.
Method A covers the startup, image recording, and shutdown procedure, and method B
the procedure for routine observation. The symbols L1, R1 and SC appearing in
parentheses after the names of panel controls designate the respective control panels.
Various objective polepieces are provided in this instrument. This chapter describes all
the operation procedures in the case of using the EM-20014 (ultrahigh resolution
polepiece).
EM-23078 or EM-23075 vacuum system is incorporated in this instrument. A TMP
(turbo-molecular pump) is used in the EM-23078 system. An SIP (sputter ion pump) is
used in the EM-23075. this chapter describes operation assuming that the EM-23075
system is used.
■
METHOD A (Sect. 5.2)
It is advisable to become familiar with method A before attempting methods B.
Procedures detailed in this section are skeletonized in the section on method B.
■
METHOD B (Sect. 5.3)
This section covers the routine operation of the microscope. Practice method A (
F
Sect.
5.2) repeatedly before attempting method C. If a high resolution image is to be obtained,
see also Sect. 5.4.
5.1 EMERGENCIES
The “Emergency” screen (Fig. 4.51) appears when an abnormality is detected in this
instrument.
5.1.1 Power
Suspension
The microscope automatically shuts down safely. When power is restored, it is necessary
to manually restart the microscope (
F
Sect. 5.2.1).
5.1.2 Cooling Water Suspension
If water suspension continues for some time, the high voltage power and lens power
supplies are turned off and the evacuation system goes into the protected state. When the
supply of cooling water recommences, the microscope must be manually restarted (
F
Sect. 5.2.1).
5.1.3 Faulty
Operation
The microscope is protected by safety devices.
