5 OPERATION
5-30
EM210F-1
5.3.4b Shift
adjustment
This is to adjust the ratio of the current in the condenser lens beam deflector upper coil
and lower coil so that the electron beam deviation when tilting the beam is minimum.
1.
Select “Maintenance” on the “TEN Controller” main menu to display the
“Alignment Panel for Maintenance” screen.
2.
Depress the SA DIFF button (R1-
②
) to obtain the DIFF mode.
3.
Turn the BRIGHTNESS knob (L1-
⑦
) fully counterclockwise.
4.
Manipulate the DIFF FOCUS knob (R1-
⑦
) to obtain a caustic spot.
5.
Depress the “compensator-Tilt” button on the “Alignment Panel for Mainte-
nance” screen.
6.
Depress the “Wobbler-TiltX” button on the “Alignment Panel for Maintenance”
screen.
The beam spot is divided into two now.
7.
Make the divided spot a single spot using the DEF/STIG X knob (L1-
⑪
).
8.
Depress the “Wobbler-ShiftX” button on the “Alignment Panel for Mainte-
nance” screen.
9.
Depress the “Wobbler-ShiftY” on the “Alignment Panel for Maintenance”
screen.
10.
Make the divided spot a single spot using the DEF/STIG Y knob (R1-
④
).
11.
Turn off the “Wobbler-ShiftY” on the “Alignment Panel for Maintenance”
screen by depressing the button.
5.3.5 Voltage/current Center Adjustment
Fig. 5.30
