5 OPERATION
EM210F-1
5-51
5.7 SPECIAL
OPERATION
5.7.1 Alignment Data Saving
The present alignment data can be saved and produced the condition by reading the
saved data. This is useful to save the data of the alignment in the special condition. The
saved data will be useful for accidental situation such as losing the beam.
5.7.1a Saving
1.
Select “Maintenance” on the main menu on the “TEM Controller” screen to
open the “Alignment Panel for Maintenance” screen.
Fig. 5.46 Alignment Panel for Maintenance” screen
2.
Depress “Save Alignment File….” button on the screen.
3.
Determine the file name and save it.
5.7.1b
File
Reading
1.
Select “Maintenance” on the main menu on the “TEM Controller” screen to
open the “Alignment Panel for Maintenance” screen.
2.
Depress “Load Alignment File….” button on the screen.
3.
Select the file name and read it.
