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SEM (JEOL, JSM-6301) Operation manual 2014 06 11
The turning on the SEM
1.
Turn on the scanning image observation instrument with the
OPE
POWER
switch at the rear of
the instrument.
2. Rotate the
POWER
key switch to the
START
position, and release the hand from the key.
(The key rotates to the
ON
position automatically.)
3. The
ACCEL VOLTAGE READY
lamp turns on at once. (The user should confirm the lamp
turning on.)
*Please contact the staff, if the lamp does not turn on.
The sample exchange (The insert of the sample)
1. Place the sample in the sample holder (cylinder), and align the sample upper face and the upper
side of the cylinder, using the height adjusting screw (tighten by the screw).
2. Screw the sample exchange rod to the sample holder, and tighten the rod.
3. Put the sample stage to the position where the sample is possible to exchange.
Confirm
the position for the sample exchange:
X:25.0 Y:35.0 TILT:000
WD:39
4. Pull the exchange rod, and then fix the sample holder to the stopper.
5. Fit the exchange rod to the sample exchange chamber.
While supporting the exchange rod by hand, press the vacuum operation button.
6. When the lamp is turned off, rotate anticlockwise immediately the knob of the gate valve of the
sample exchange chamber, and then pull out the knob fully.
7. While looking the inner part of the chamber, push in the rod slowly, and fix the sample holder
onto the stage.
8. Rotate anticlockwise the rod, and remove the rod from the sample holder.
Pull out the sample rod from the chamber fully.
9. Push in the knob of the gate valve of the sample exchange chamber, and rotate clockwise the
knob. This operation makes a clicking sound.
10. While supporting the exchange rod by hand, remove the rod by pressing the vacuum operation
button.
The observation with the SEM
1. Press the
F2
function key on the keyboard.
2. Confirm the accelerating voltage
being
0.0 kV
(see the second line from the top on the right
side screen).
Turn on the
ACCEL VOLTAGE
switch. The extracting voltage is applied, and the emission
