E-1
Introduction
Your purchase of the FILM FLOW METER SF-1U/SF-2U is greatly appreciated.
This instruction manual describes the operating procedures and simple maintenance
procedures of the equipment. Before operating this product, please read the instructions
carefully and save this manual for future use. Always operate and maintain the equipment
correctly so that the HORIBA STEC,CO.,LTD. product can serve you best over a long period
of time.
If you have any questions or encounter product failure, contact HORIBA STEC,CO.,LTD. or
the closest agent of ours.
Product Guarantee
Term of guarantee
Equipment is guaranteed for one (1) year after the day of acceptance validation. If any
failure occurs and we are informed of the failure during this period, we will repair
equipment free of charge.
If any initial failure occurs or if a failure or nonconformity occurs despite observation of
instructions in the instruction manual, we will repair or replace defective parts free of
charge.
We will charge for repairing or replacing defective parts after the term of the guarantee
and for upgrading hardware or software.
The standard service life of this equipment is ten (10) years after manufacture for reasons
of safety and reservation of parts.
Scope of guarantee
This guarantee applies only to this equipment.
The guarantee does not cover, for example, damage caused by failure of this equipment
(loss of profit, customer confidence, facilities, and properties).
The user shall be responsible for safety in the use of this equipment and its peripherals.
For the recommended maintenance period and consumables, see details of maintenance and
recommended periods in the instruction manual.
Exemptions
The user will be charged for repair or replacement of parts even within the term of the
guarantee if a failure occurs for the following reasons:
Failure is caused by any inevitable accident, such as a natural disaster.
Failure is caused by improper handling or negligence in attention.
Equipment is used or stored under inappropriate environmental conditions.
Equipment is used over the rated range or is modified or used for an unintended
purpose.
We are not responsible for failure or the failure has been separately defined.
・
Unauthorized reprinting or copy of this manual is not strictly prohibited.
・
The contents of this manual are subject to change without notice.
・
This manual has been carefully written. However, if you find any oversights, please let us
know.
・
Snoop
®
is a registered trademark of Swagelok Company.
Содержание SF-1U
Страница 1: ...FILM FLOW METER SF 1U 2U Instruction Manual CODE I030248700E...
Страница 2: ...May 2016 2004 2016 HORIBA STEC Co Ltd...
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Страница 5: ...J iii 1 2 3 4 5 6 7 8 1 40 2 3 4 5 40 6 7 8 9 10 11 12 13...
Страница 7: ...J 1 SF 1U SF 2U Snoop Swagelok Company...
Страница 8: ...J 2 1 SF VP 1384428 SF 2U 2 0 35 1013 3hPa 1 3 SF 1U SF 2U 1 Snoop 59ml 1 I030248700 1 AC...
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Страница 12: ...J 6 6 6 1 6 1 1 6 1 2 AC...
Страница 13: ...J 7 6 1 3 VP 1U 4U SF 3 4 6 1 4 2 3cm 4cm Snoop Snoop...
Страница 14: ...J 8 6 1 5 VP 1U 3U 6mm 5 6mm VP 4U 10mm 9 10mm 10mm 9 10mm 3L min 2cm VP 1U 2U 1 2mm...
Страница 15: ...J 9 6 1 6 25 5 0 35 25 3 6 1 7 3 10 6 2 6 2 1 N2 5 20 1 1...
Страница 16: ...J 10 6 2 2 SF 1U 730 1070hPa 1013 3hPa SF 2U 2 730 1070hPa 1013 3hPa 2 6 2 3 2...
Страница 19: ...J 13 8 8 1...
Страница 20: ...J 14 8 2 A1 A1 A1 120 VP 1U 180 120 180 6 4 120 120 6 4 A1 7 1 3...
Страница 21: ...J 15 8 3 A2 A2 A2 120 VP 1U 180 120 180 6 4 7 1 3...
Страница 22: ...J 16 8 4 A3 A3 A3 7 1 3 8 5 A4 A4 A4...
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Страница 29: ...J VI B SF 1U 2U 3 3 1 RS 232C 8 1 2 NON 3 2 9600 bps 5 9600 4800 2400 1200bps 3 3 BUSY 3 4 CBM 910II 24RxxxxA...
Страница 39: ...E 4 5 Description of each part Fig 2 Description of each part...