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E-8
6.1.5. Piping
①
Connect the tube to the measurement gas inlet.
VP-1U
〜
3U
:
Outer diameter 6 mm hose connector (For soft tube of inner diameter 5-6 mm)
VP-4U
:
Outer diameter 10 mm hose connector (For soft tube of inner diameter 9-10 mm)
②
Connect the tube to the measurement gas outlet.
Outer diameter 10 mm hose connector (For soft tube of inner diameter 9-10 mm)
WARNING
DO NOT LET REACTIVE GAS FLOW.
Do not let reactive gas that react with water or oxygen. This equipment
doesn’t have a perfect gas sealing. Besides, it uses liquid for filming. Letting
reactive gas flow may cause damage or injury through fire or explosion.
LEAD GAS TO SAFE PLACE.
Make an exhaust line to a safe place. Otherwise an explosion or other
hazards may happen.
NOTE
While the measurement gas should go through heat exchange process
with the measurement ambient temperature. The difference between the
measurement gas temperature and the measurement ambient temperature
adversely affects the film creation and measurement accuracy.
The measuring gas has to be saturated with vapor when the intended flow
rate is over 3L/min. The dry gas causes not only drying the volume tube,
but an inaccurate result.
Stop the gas flow when you don’t measure. Otherwise, the inside of the
measuring tube may be contaminated.
REF
.
The tube should be as short as possible. This is to reduce the gas volumetric
changes due to minute changes in the temperature.
If you exhaust the measuring gas by drafting, be careful for the pressure of
measurement gas not to drop.
When measuring a minute amount of flow rate, use a reducer or a similar device
so that the tube diameter can be as small as possible.(For the gas inlet only)
A more correct result can be obtained if the measuring gas is humidified enough
before the measuring unit.
③
Put a piece of film removal paper, about 2 cm from the tip, in its port. This is to
reduce measurement time. (For VP-1U,2U only)
※
The film removal paper should be made by twisting a piece of paper with water
absorptivity. Its diameter should be 1 to 2 mm.
NOTE
Do not put film removal paper over 2 cm. Otherwise, it blocks the passage
of the gas, and causes an inaccurate result.
Replace film removal paper often. The passage may be tight when the
paper expands and this causes an inaccurate result.
Be sure to use the rubber cap whenever measuring flow rates.
Содержание SF-1U
Страница 1: ...FILM FLOW METER SF 1U 2U Instruction Manual CODE I030248700E...
Страница 2: ...May 2016 2004 2016 HORIBA STEC Co Ltd...
Страница 3: ...J i...
Страница 4: ...J ii...
Страница 5: ...J iii 1 2 3 4 5 6 7 8 1 40 2 3 4 5 40 6 7 8 9 10 11 12 13...
Страница 7: ...J 1 SF 1U SF 2U Snoop Swagelok Company...
Страница 8: ...J 2 1 SF VP 1384428 SF 2U 2 0 35 1013 3hPa 1 3 SF 1U SF 2U 1 Snoop 59ml 1 I030248700 1 AC...
Страница 10: ...J 4 5 2...
Страница 12: ...J 6 6 6 1 6 1 1 6 1 2 AC...
Страница 13: ...J 7 6 1 3 VP 1U 4U SF 3 4 6 1 4 2 3cm 4cm Snoop Snoop...
Страница 14: ...J 8 6 1 5 VP 1U 3U 6mm 5 6mm VP 4U 10mm 9 10mm 10mm 9 10mm 3L min 2cm VP 1U 2U 1 2mm...
Страница 15: ...J 9 6 1 6 25 5 0 35 25 3 6 1 7 3 10 6 2 6 2 1 N2 5 20 1 1...
Страница 16: ...J 10 6 2 2 SF 1U 730 1070hPa 1013 3hPa SF 2U 2 730 1070hPa 1013 3hPa 2 6 2 3 2...
Страница 19: ...J 13 8 8 1...
Страница 20: ...J 14 8 2 A1 A1 A1 120 VP 1U 180 120 180 6 4 120 120 6 4 A1 7 1 3...
Страница 21: ...J 15 8 3 A2 A2 A2 120 VP 1U 180 120 180 6 4 7 1 3...
Страница 22: ...J 16 8 4 A3 A3 A3 7 1 3 8 5 A4 A4 A4...
Страница 23: ...J 17 8 6 8 7 7 1 3...
Страница 29: ...J VI B SF 1U 2U 3 3 1 RS 232C 8 1 2 NON 3 2 9600 bps 5 9600 4800 2400 1200bps 3 3 BUSY 3 4 CBM 910II 24RxxxxA...
Страница 39: ...E 4 5 Description of each part Fig 2 Description of each part...