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自動式精密膜流量計

FILM FLOW METER
SF-1U/2U

取扱説明書

Instruction Manual

CODE: I030248700E

Содержание SF-1U

Страница 1: ...FILM FLOW METER SF 1U 2U Instruction Manual CODE I030248700E...

Страница 2: ...May 2016 2004 2016 HORIBA STEC Co Ltd...

Страница 3: ...J i...

Страница 4: ...J ii...

Страница 5: ...J iii 1 2 3 4 5 6 7 8 1 40 2 3 4 5 40 6 7 8 9 10 11 12 13...

Страница 6: ...1 6 6 1 2 6 6 1 3 7 6 1 4 7 6 1 5 8 6 1 6 9 6 1 7 9 6 2 9 6 2 1 9 6 2 2 10 6 2 3 10 6 3 11 6 4 11 7 12 7 1 12 7 1 1 12 7 1 2 12 7 1 3 12 7 2 12 7 2 1 12 7 2 2 12 8 13 8 1 13 8 2 A1 14 8 3 A2 15 8 4 A3...

Страница 7: ...J 1 SF 1U SF 2U Snoop Swagelok Company...

Страница 8: ...J 2 1 SF VP 1384428 SF 2U 2 0 35 1013 3hPa 1 3 SF 1U SF 2U 1 Snoop 59ml 1 I030248700 1 AC...

Страница 9: ...2 10 ml min 20 100 ml min 200 1000 ml min 1 10 L min 0 2 0 2 2 ml min 2 20 ml min 20 200 ml min 0 2 1 L min 0 5 2 10 ml min 20 100 ml min 200 1000 ml min 1 10 L min N2 Air O2 H2 He Ar CO CH4 C3H8 730...

Страница 10: ...J 4 5 2...

Страница 11: ...AC 6 1 2 POWER 6 1 7 6 1 3 4 999 9ml min ml min 1000ml min L min 2 A A 10 1 5 0 40 0 15 0 35 0 4 1 730 1070hPa 930 1040hPa SF 2U hPa hPa SF 1U 8 2 8 3 8 4 8 5 8 2 6 1 6 1 0 35 0 02 10 6 2 3 6 2 1 sec...

Страница 12: ...J 6 6 6 1 6 1 1 6 1 2 AC...

Страница 13: ...J 7 6 1 3 VP 1U 4U SF 3 4 6 1 4 2 3cm 4cm Snoop Snoop...

Страница 14: ...J 8 6 1 5 VP 1U 3U 6mm 5 6mm VP 4U 10mm 9 10mm 10mm 9 10mm 3L min 2cm VP 1U 2U 1 2mm...

Страница 15: ...J 9 6 1 6 25 5 0 35 25 3 6 1 7 3 10 6 2 6 2 1 N2 5 20 1 1...

Страница 16: ...J 10 6 2 2 SF 1U 730 1070hPa 1013 3hPa SF 2U 2 730 1070hPa 1013 3hPa 2 6 2 3 2...

Страница 17: ...11 02 10 1 10 1 9 10 1 4 3 10 2 6 3 Q L min at 1013 3hPa t V L Pa hPa S sec Pw t hPa T 0 273K Po 1013 3hPa to 6 4 A1 120 A2 120 VP 2U VP 1U A1 A2 5 1 999 A1 A2 120 VP 1U 180 Po Pw Pa t T to T S V Q 6...

Страница 18: ...J 12 7 7 1 7 1 1 6 1 4 7 1 2 6 1 4 7 1 3 2 3 6 1 4 7 2 SF 2U VP 1 7 2 1 2 2 2 3 7 2 2 Snoop 236ml No S000025 3024000025 AC PS SF 100C No S242802 3200496396 AC AC...

Страница 19: ...J 13 8 8 1...

Страница 20: ...J 14 8 2 A1 A1 A1 120 VP 1U 180 120 180 6 4 120 120 6 4 A1 7 1 3...

Страница 21: ...J 15 8 3 A2 A2 A2 120 VP 1U 180 120 180 6 4 7 1 3...

Страница 22: ...J 16 8 4 A3 A3 A3 7 1 3 8 5 A4 A4 A4...

Страница 23: ...J 17 8 6 8 7 7 1 3...

Страница 24: ...J I A SF 1U U2 CPU 1 1 1 RS 232C 8 1 2 NON 1 2 9600 bps 5 9600 4800 2400 1200bps 1 3 CPU CPU 1 4 SF SC NSF PCV 2m No S089362 3024059056 RS 232C...

Страница 25: ...CPU CPU 2 2 CPU SF E E CR R R CR 1 S S1 CR S0 S2 10 CR S2 CR 2 S3 CR 3 S10 CR 10 P P730 0 CR 730 0hPa P1000 0 P730 0 P1070 0 CR P1070 0 CR 1070 0hPa P1070 1 P1070 1 CR 1013 3hPa P729 9 P730 0 CR P0 0...

Страница 26: ...FRL1 234 1 234 1 234 CR 2 FRL1 234 1 234 1 234 1 234 CR 3 FRL123 4 123 4 123 4 123 4 123 4 123 4 123 4 123 4 123 4 123 4 123 4 CR 10 2 TIME12 54 CR 0 000 9 999sec 10 00 99 99 sec 100 0 999 9sec 1 10 T...

Страница 27: ...CR S2 CR 2 S3 CR 3 S10 CR 10 R CR E 1 STP1 CR 2 ST T 25 0 CR ST T 0 0 CR 3 MJ T 25 4 CR MJ T 9 4 CR 4 AT P1070 0 CR AT P 730 0 CR 5 A0 CR A1 CR A2 CR A3 CR 2 3 4 5 2 10 0 10 0 2 3 10 0 10 0 3 4 1000 0...

Страница 28: ...J V E P E R S P 1 STP2 CR 2 ST T 25 0 CR ST T 0 0 CR 3 MJ T 25 4 CR MJ T 9 4 CR 4 AT P1070 0 CR AT P 730 0 CR 5 A0 CR A4 CR 2 3 4 5 2 10 0 10 0 2 3 10 0 10 0 3 4 1000 0hPa 1000 0hPa 4 5 A0 A4...

Страница 29: ...J VI B SF 1U 2U 3 3 1 RS 232C 8 1 2 NON 3 2 9600 bps 5 9600 4800 2400 1200bps 3 3 BUSY 3 4 CBM 910II 24RxxxxA...

Страница 30: ...84 ml min TEMPERATURE 24 8 C TEMPERATURE 9 9 C AT PRESSURE 1013 0hPa AT PRESSURE 1013 0hPa TIME 1 009 sec TIME 1 009 sec Third time Third time FLOW RATE 1 984 l min FLOW RATE 1 984 ml min TEMPERATURE...

Страница 31: ...aults or damage to the equipment REF Reference to improve measurement accuracy WARNING DO NOT LET REACTIVE GAS FLOW Do not let reactive gas that react with water or oxygen This equipment doesn t have...

Страница 32: ...gh glass broken BE SURE TO FIX MEASURING UNIT Make sure that the measuring unit is fixed to the main body by turning the fixing lever when you install Carrying or using them without fixing may cause d...

Страница 33: ...tion on Disposal of Electrical and Electronic Equipment The crossed out wheeled bin symbol shown on the product or accompanying documents indicates separate collection for waste electrical and electro...

Страница 34: ...s are wet from rain which is easy to slip 5 Always fix and secure the container with a rope to prevent toppling or falling when moving storing or for consumption of the container 6 Do not apply any im...

Страница 35: ...atmospheric pressure 10 6 2 3 Measurement 11 6 3 Explanation on flow rate expression 12 6 4 Alarm time setting 12 7 MAINTENANCE 13 7 1 Daily maintenance 13 7 1 1 Replenishing filming liquid 13 7 1 2...

Страница 36: ...uipment is ten 10 years after manufacture for reasons of safety and reservation of parts Scope of guarantee This guarantee applies only to this equipment The guarantee does not cover for example damag...

Страница 37: ...easuring tube is calibrated to a high precision The equipment calculates the flow rate when it measures the time of the soap film moving over the distance between the start and stop detection points I...

Страница 38: ...When used for correction overall accuracy becomes 0 7 from 0 5 and 1 2 from 1 0 respectively Display LCD 6 digit digital display Readings are switched among measured flow rate measurement time tempera...

Страница 39: ...E 4 5 Description of each part Fig 2 Description of each part...

Страница 40: ...ment is completed Display range 5 0 40 0 C Temperature accuracy guaranteed 15 35 Mode display Timing Significant digit 4 digits Atmospheric pressure Significant digit Significant digit 1 st decimal pl...

Страница 41: ...ere condensation occurs or getting wet Windy areas Chambers where the doors are open closed frequently REF To ensure precision flow rate measurement use the equipment in an isothermal chamber installe...

Страница 42: ...g over Fig 3 Installing measuring unit Fig 4 Pouring filming liquid 6 1 4 Pouring filming liquid Put the nozzle of filming liquid bottle 2 cm to 3 cm into the measurement gas inlet port on the left si...

Страница 43: ...nded flow rate is over 3L min The dry gas causes not only drying the volume tube but an inaccurate result Stop the gas flow when you don t measure Otherwise the inside of the measuring tube may be con...

Страница 44: ...25 0 Turn off the power switch to secure the entry The equipment stores the settings even after turning off the power The calibration temperature can be checked by following two ways Turn on the power...

Страница 45: ...detector When operated during waiting Stops when a short pip sound is heard When operated during measurement Present measurement continues NOTE Make sure that there is no film inside the measuring tu...

Страница 46: ...detector detects the liquid films Automatic measurement Press the AUTO key once to enter AUTO lights up The indicator on the AUTO key will light up And the automatic measurement mode measurement count...

Страница 47: ...bration temperature t Ambient temperature at the time of measurement Pa Atmospheric pressure hPa Pw Vapor pressure at t hPa Po Standard atmospheric pressure 1013 3hPa 6 4 Alarm time setting Set to 120...

Страница 48: ...ater Remove the vinyl tube Fill the equipment with filming liquid after drying inside the measuring tube 6 1 4 7 2 Periodical maintenance Periodical maintenance accuracy inspection and re calibration...

Страница 49: ...CO LTD is able to provide you with quick service 8 1 The equipment is not turned on Power is not turned on Check the power source Abnormal Normal Power supply Abnormal Check AC adapter and connectors...

Страница 50: ...or the services is recommended A1 alarm This alarm is generated if the time from film creation to its detection by the start detector takes more than 120 seconds 180 seconds for VP 1U due to film brea...

Страница 51: ...erhaul detector Items marked with are services from HORIBA STEC CO LTD or your dealer Placing order for the services is recommended A2 Alarm A stop detector error occurs It is generated if the time fr...

Страница 52: ...of the detector is low This occurs when the interior walls of the measuring tube are contaminated or a similar event occurs Clean the measuring tube 7 1 3 Press the START key to reset the alarm 8 5 A...

Страница 53: ...EC CO LTD or your dealer Placing order for the services is recommended 8 7 Clock does not work Clock count abnormality Abnormal Check filming liquid for contamination Adjust Normal liquid level Check...

Страница 54: ...e holding the AUTO key turn on the power switch Hold down the AUTO key for five seconds The equipment is ready for setting the baud rate While checking the display use the SET keys to enter the select...

Страница 55: ...r longer equipment carries out automatic wetting operation S S1 CR Similar when pressing START key equipment carries out normal measurement S0 Other thanS2 10 CR S2 CR Automatic measurement twice Simi...

Страница 56: ...matic measurement 10times 2 TIME12 54 CR Normal measurement Measurement duration Position of decimal point in each time range 0 000 9 999sec 10 00 99 99 sec 100 0 999 9sec The colon is a data delimite...

Страница 57: ...rement or automatic wetting operation The equipment returns the state of aborting the present operation present parameter settings and alarm condition Order Format Delimiter Response data description...

Страница 58: ...dicates blank MJ T__9 4 CR 4 AT P1070 0 CR Set atmospheric pressure _ indicates blank AT P_730 0 CR 5 A0 CR When no error occurs A4 CR Low voltage alarm Data formats 2 3 4 and 5 above 2 Depending on w...

Страница 59: ...y turn on the power switch Hold down the AUTO key for five seconds The equipment is ready for setting the baud rate While checking the display use the SET keys to enter the selection The baud rate can...

Страница 60: ...4 ml min TEMPERATURE 24 8 C TEMPERATURE 9 9 C AT PRESSURE 1013 0hPa AT PRESSURE 1013 0hPa TIME 1 009 sec TIME 1 009 sec Third time Third time FLOW RATE 1 984 l min FLOW RATE 1 984 ml min TEMPERATURE 2...

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