COMPASS
for molbox™ User’s Manual
© 1998-2003
DH Instruments, Inc
.
Page 196
Table 64.
Flow Unit Conversion Formulas
DESCRIPTION
EQUATION
Determine gas density for any gas.
(
)
(
)
RT
Z
P
M
T
P
w
T
P
,
,
=
ρ
Determine kg/s flow from sccm (or ccm) at a given pressure and
temperature. If sccm is used, P and T are defined by the flow unit. sccm
@ 70F would use standard atmosphere (101.325 kPa) for P and 70F for T
(see Section 14.1). If the unit is ccm, the instantaneous pressure and
temperature must be used for P and T.
(
)
(
)
7
,
,
10
6
x
sccm
s
kg
T
P
T
P
ρ
=
Determine sccm (or ccm) flow from kg/s at a given pressure and
temperature.
(
)
(
)
T
P
T
P
x
s
kg
sccm
,
7
,
10
6
ρ
=
Conversion from pccm to mol/s
s
mol
x
pccm
6
10
34483
.
1
=
Conversion from pccm to mol/s
6
10
34483
.
1
x
pccm
s
mol
=
Determine kg/s from mol/s.
s
mol
M
s
kg
w
1000
=
Determine mol/s from kg/s.
s
kg
M
s
mol
w
1000
=
The “p” in pccm indicates “perfect” in which a gas compressibility factor of 1 is assumed for all gases.
In early 1996, SEMI, a semiconductor industry group, adopted standard E12-96 which specified that
this definition be used for volumetrically base mass flow units.
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