Chapter 4 Description of Functions
4-15
4
Example of setting values and sampling cycle (1 head connec-
tion) in constant pitch measurement mode
Measuring range
Pitch Wide cell
Unit de-
tection
time
Beam power
control count
Sampling
cycle
Width
Height
±6.25mm ±10mm
50μm
None
100 μs 0 <Continuous>
49 ms
100μm
None
100 μs 0 <Continuous>
16 ms
250μm
5 cells
100μs
0 <Continuous>
7 ms
250μm
5 cells
100μs
Twice
28 ms
● Multi-select displacement sensing mode
The sampling cycle is changed by the following 4 items.
The sampling cycle also changes when the number of OUT calculations (*1)
used is increased, and the median filtering process is used.
1)
Number of specified positions: 2 to 10
2)
Wide cell: None, 5 cells, 7 cells, 15 cells, 41 cells
3)
Unit detection time: 40 μs to 2 ms
4)
Beam power control count: 0 (continuous), 1 to 4
The larger the value of Item 1) to 4) is, the larger the sampling cycle is.
*1: Out calculation refers to OUT1, OUT2, OUT3, and OUT-OUT calcula-
tions, total judgment and shape judgment. Shape judgment can not be used in
the constant-pitch measurement and the multi-select displacement sensing
mode.
Relation between setting values and sampling cycle in multi-select
displacement sensing mode (example for 1 head connection)
No. of speci-
fied positions
Wide cell
width
Unit detection
time
Number of light
intensity con-
trols
Sampling
cycle
2 points
None
40 μs
0 <Continuous>
80 μs
2 points
15 cells
40 μs
0 <Continuous>
250 μs
2 points
None
100 μs
4 times
1.6 ms
10 points
None
100μs
0 <Continuous>
1 ms
10 points
15 cells
1 ms
0 <Continuous>
10 ms
10 points
15 cells
1 ms
4 times
80 ms
In 2 head connection, the sampling cycle of each head is doubled.
When head B is not connected, do not select
"Multi-select displacement
sensing mode"
in head B setting.If
"SEND"
is executed,
"Illegal parameter"
error occurs.Set it to
"multi-zone beam control measurement mode"
which
is the default.
Summary of Contents for HL-D3 Series
Page 9: ...Preface 7 ...
Page 27: ...Preface 24 MEMO ...
Page 43: ...Chapter 1 Before Use 1 16 1 MEMO ...
Page 219: ...Chapter 4 Description of Functions 4 140 4 MEMO ...
Page 298: ...1 Apx Appendix 1 Index 2 ...
Page 304: ......