Chapter 4 Description of Functions
4-20
4
Classi-
fication
Function (
:RS232C)
Default value
Save
Memory
change
Reference
page
Head A
Head B
H
e
a
d
s
e
tt
in
g
M
a
s
k
s
e
tt
in
g
Mask area
2
Coordinates 1
230,230
230,230
Coordinates 2
310,230
310,230
Coordinates 3
310,270
310,270
Coordinates 4
230,270
230,270
Moving average
None
None
Width smoothing
±1
±1
Point alarm delays
None
None
Mirror reflection coefficient
1.000000
1.000000
Light intensity peak width limit
None
None
S
e
tt
in
g
fo
r
e
a
c
h
m
e
a
s
u
re
m
e
n
t m
o
d
e
Multi-zone beam control meas-
urement item
Beam power control unit
Width
100 μm
Width
100 μm
Constant pitch measurement
item
Measuring pitch
None
None
Wide cell width
None
None
Wide cell processing
Average
value
Average
value
M
u
lti
-s
e
le
c
t
d
is
p
la
c
e
m
e
n
t
s
e
n
s
in
g
it
e
m
s
No. of specified positions
10
10
M
e
a
s
u
rin
g
p
o
s
iti
o
n
Position 1
-5.000mm -5.000mm
Position 2
-4.000mm -4.000mm
Position 3
-3.000mm -3.000mm
Position 4
-2.000mm -2.000mm
Position 5
-1.000mm -1.000mm
Position 6
0.000mm
0.000mm
Position 7
+1.000mm +1.000mm
Position 8
+2.000mm +2.000mm
Position 9
+3.000mm +3.000mm
Position 10
+4.000mm +4.000mm
Wide cell width
None
None
Wide cell processing
Common
(average)
Common
(average)
Slope correction zone (position)
Multi-select
displace-
ment sens-
ing mode
1
Not speci-
fied
Not speci-
fied
2
Not speci-
fied
Not speci-
fied
Summary of Contents for HL-D3 Series
Page 9: ...Preface 7 ...
Page 27: ...Preface 24 MEMO ...
Page 43: ...Chapter 1 Before Use 1 16 1 MEMO ...
Page 219: ...Chapter 4 Description of Functions 4 140 4 MEMO ...
Page 298: ...1 Apx Appendix 1 Index 2 ...
Page 304: ......