Panasonic HL-D3 Series, User Manual

Page: 6 / 305

Preface
4

Ver1.1x
→
Ver1.2x (Controller, SMI) ··· 4-28
■
Ver1.2x
→
Ver2.0x (Sensor head,
Controller , HL-D3SMI) ·················· 4-28

Ver2.01
→
Ver2.0x (Controller,
HL-D3SMI) ·································· 4-29
■
Ver2.02
→
Ver2.10 (Controller) ·········· 4-29
Ver2.03
→
Ver2.10 (HL-D3SMI) ········ 4-29
4-4
Description of Each Function ·· 4-30
4-4-1
Main Screen and Function at
Start-up ··································· 4-30
(1) Display on separate window ··········· 4-31
(2) Controller operation ····················· 4-31
(3) Controller connection status ·········· 4-32
(4) Sensor information ······················ 4-33
(5) Memory change ·························· 4-34
(6) Setting zone ······························· 4-35
(7) Menu ········································ 4-36
4-4-2
Head Setting ······················ 4-37

Head setting tab screen ················· 4-37

Measurement mode selection ·········· 4-37

Width (X) meas. rng. ····················· 4-38

Height (Z) meas. rng. ···················· 4-38

Unit detection time ························ 4-39

Sens. adjust. ······························· 4-39

Sensitivity ratio ···························· 4-39

Beam pwr ctrl cnt.························· 4-40

Measurement value extraction ········· 4-41

X position correct. ························ 4-41

Height correct. ····························· 4-42

Slope correct. ······························ 4-43

Moving average ··························· 4-47

Width smoothing ·························· 4-47

Point alarm delays ························ 4-48

Mirror reflection coefficient ············· 4-48

Mask function ······························ 4-49

Light intensity peak width limit ········· 4-53
4-4-3
Setting for Measurement Mode4-55

Setting tab screen for each mode ····· 4-55

Items for multi-zone beam control
measurement mode ······················ 4-56

Items for constant pitch measurement
mode ········································· 4-57

Items for multi-select displacement
sensing mode ······························ 4-58

Item for X position correction settings 4-59

Slope correction area (used in
non-multi-select displacement
sensing mode) ····························· 4-61

Sending set value to sensor ············ 4-61
4-4-4
OUT Setting ······················· 4-62

OUT setting tab screen (OUT1, OUT2,
OUT3)········································ 4-62

Target head selection ···················· 4-62

Hold measurement························ 4-63

Waveform calculation selection ········ 4-64

Specification of calculation target area
················································ 4-67

Selection of calculation target area ··· 4-68

Offset val. ··································· 4-77

Hi judg. val. ································ 4-78

Low judg. val. ······························ 4-78

Judgement hysteresis width ············ 4-78

Filter ········································· 4-79

Sending set value to sensor ············ 4-79
4-4-5
OUT-OUT calculation setting ·· 4-80

OUT-OUT calculation setting tab
screen ······································· 4-80

OUT-OUT calculation setting tab
screen ······································· 4-80
4-4-6
Total judgment and Shape judgment
setting ····································· 4-82

Total judgment and Shape judgment
setting tab screen ························· 4-82

Total judgment measurement ·········· 4-83
■
Shape judgment measurement ········· 4-85
■
Setting of reference Z value ············ 4-88
■
Setting of reference X position ········· 4-89
■
Setting of measurement position ······ 4-90
4-4-7
Common Setting ················· 4-92

Common setting tab screen ············ 4-92

Continuous measurement trigger signal
source········································ 4-92
■
Z-axis coordinate direction ·············· 4-93
■
Input terminal layout settings ··········· 4-96
■
Output terminal layout settings ········· 4-97

Err. value rmvl lvl. ························ 4-98

Defect processing ························ 4-98

Judgement operation at measurement
value alram ································· 4-99

Meas. alarm output delay cnt. ················· 4-99

Output mode ······························ 4-100

Output OFF delay ························ 4-100
4-4-8
HL-D3SMI System Settings ·· 4-101

System setting window and function 4-101

Interpolation method ···················· 4-103

Graph display method ·················· 4-104

Set value list screen ···················· 4-104
4-4-9
Acquisition of Detected Light
Intensity Image and Shape Waveform
··········································· 4-105

How to use ································ 4-105

Detected light intensity image
acquisition windowand function ······· 4-105

Acquisition of detected light intensity
image ······································· 4-107

Operation for acquisition of detected
light intensity image ····················· 4-108

Display of acquisition image in each
measurement mode ····················· 4-108

Display of shape waveform ············ 4-110