Chapter 4 Description of Functions
4-109
4
[Whole measurement mode]
The detected light intensity image according to the specified measuring
range is acquired.
The image shows the condition with the same beam radiation in whole.
It shows auto/fixed of the sensitivity adjustment for setting of the maximum
radiation time.
[Multi-zone beam control measurement mode]
The detected light intensity image according to the specified measuring
range is acquired.
The detected light intensity image with multi-zone beam control according
to selection of multi-zone conditions and the beam power control count is
acquired.
It shows auto/fixed of the sensitivity adjustmentl for setting of the unit de-
tection time.
* If the light intensity is not sufficient, increase the maximum radiation time.
[Constant pitch measurement mode]
Pitch settings are not indicated and the overall detected light intensity image
is acquired.
The detected light intensity image acquired has the same condition as
"Width 100 μm"
in the multi-zone beam control measurement mode.
For unit detection time, auto/fixed of sensitivity adjustment and the beam
power control count, the detected light intensity image is acquired under the
set conditions.
[Multi-select displacement sensing mode]
Multi-select position settings are not indicated and the overall light intensity
image is acquired.
The detected light intensity image acquired has the same condition as
"Width 100
μm"
in the multi-zone beam control measurement mode.
For unit detection time, auto/fixed of sensitivity adjustment and the beam
power control count, the detected light intensity image is acquired under the
set conditions.
Summary of Contents for HL-D3 Series
Page 9: ...Preface 7 ...
Page 27: ...Preface 24 MEMO ...
Page 43: ...Chapter 1 Before Use 1 16 1 MEMO ...
Page 219: ...Chapter 4 Description of Functions 4 140 4 MEMO ...
Page 298: ...1 Apx Appendix 1 Index 2 ...
Page 304: ......