Chapter 4 Description of Functions
4-56
4
Items for multi-zone beam control measure-
ment mode
Setting items for multi-zone beam control are as follows:
Setting items
Selection details
Description
Sens. adjust.
Auto/Fixed
(default value: Auto)
Select
"Auto"
for sensitivity
adjustment.
Use the
"Head setting"
tab for
setting.
Beam pwr ctrl
cnt.
0 time continuous
1 to 4 times
(default value: 2 times)
Use the
"Head setting"
tab for
setting.
Beam pwr ctrl
unit.
All points <Width 25 um>
Width 100 um
Width 200 um
(default value:
Width 100
μm)
Specify the zone width (control
unit) for sensitivity adjustment.
The width value is a guideline.
The smaller the control unit is,
the more stable the measure
values at each part are. However,
the measuring cycle (sample
cycle) is long.
For sensitivity adjustment and beam power control count, refer to
Head settings".
Summary of Contents for HL-D3 Series
Page 9: ...Preface 7 ...
Page 27: ...Preface 24 MEMO ...
Page 43: ...Chapter 1 Before Use 1 16 1 MEMO ...
Page 219: ...Chapter 4 Description of Functions 4 140 4 MEMO ...
Page 298: ...1 Apx Appendix 1 Index 2 ...
Page 304: ......