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CHAPTER 4:
Basic Operation
Model CRX-6.5K Probe Station
4. While observing the probe tip through the microscope, turn the differential knob
to adjust the angle, as shown in FIGURE 4-13, visually noting the three points’
alignment to the x-y plane.
5. Check the angle by landing the probe, making contact to a metallic substrate and
then raising it again. Marks made by the probe points on the metallization can be
seen with the microscope at high magnification.
6. Repeat steps 4 and 5 until the probe points make three uniform marks on the
metallization.
7. If the adjustment range of the differential knob is inadequate, the probe must be
manually rotated in the probe arm inside the vacuum chamber by loosening the
probe arm set screws and manually rotating the probe body. Once the probe has
been properly planarized, raise the probe 3 mm to 4 mm to avoid damage.
8. Carefully tighten the four M4 screws holding the bellows flange to the z-axis
stage assembly. Tighten the bottom two screws first, and then tighten the top
two screws.
9. Check the planarization once more to be sure tightening the bellows’ screws did
not change the angle.
10. See section 2.5 for more information on making microwave measurements.
FIGURE 4-13
Turn the differential knob to adjust the angle
