Veeco Dimension 3100, Руководство пользователя

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Stage System
Stage Menu Commands
78 Dimension 3100 Manual Rev. D
Figure 5.2g Set Reference Prompt
3. Click Origin in the Set Reference panel; this is the first of two points to be used for defining
a reference line on the coordinate grid.
4. Quit the Set Reference menu, and use the Focus Surface option and trackball to either move
the stage right or upward as necessary.
Move Stage Right
a. Move the stage to the right to a second point on the linear feature. (This second point,
along with the point of origin, defines the X-axis.)
b. Quit the Focus Surface option, and return to the Set Reference option under the Stage
pop-down menu.
c. Click on the X Axis option. This establishes the (Y = 0) reference line.
Move Stage Upward
a. Move the stage upward to a second point on the linear feature. (This second point, along
with the point of origin, defines the Y-axis.)
b. Quit the Focus Surface option, and return to the Set Reference option under the Stage
pop-down menu.
c. Select the Y Axis option. This establishes the (X = 0) reference line.
Note: Accuracy improves if the two points defining a reference line are located at
some distance to each other. For maximum angular accuracy, the two points
should be located at opposite sides of the sample (see
Figure 5.2h ). The left
image depicts two closely located points to define the X-axis. The right image
depicts a more accurate reference line defined by two, widely spaced points.
Figure 5.2h Defining the X-Axis
Set Reference
X Axis Y Axis Origin Reset Quit
X X XX