Veeco Dimension 3100, Руководство пользователя

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Calibration
Fine-tuning for X-Y Calibration
328 Dimension 3100 Manual Rev. D
8. Multiply the quotient obtained above by the X fast sens value shown on the Scanner
Calibration panel.
9. Enter the new value. The new value adjusts the scanner’s fast axis to more closely match
calculated distances with actual feature distances. The new sensitivity setting takes effect as
soon as it is entered.
10. To save it to the computer’s hard disk, click on
OK
. This closes the Scanner Calibration
panel.
17.7.3 Measure Vertically at 440V Scan Size
1. Return to the image of the calibration reference.
2. Clear the horizontal line drawn earlier and click the right mouse button, or click on
CLEAR
.
3. Wait for at least three full scans to allow the piezo to stabilize then select two widely spaced
features and draw a vertical line connecting like portions of features (top edge-to-top edge,
etc.). The SPM displays the calculated distance between features.
4. Verify that the microscope’s calculated distance agrees with the known vertical distance. If
there is significant disagreement between the two, fine tuning is required; go to the next step.
If the displayed distance agrees with the known distance, skip to
Section 17.7.4 .
5. Using the results from the above step, divide the known distance by the distance displayed
next to the line drawn a few steps earlier.
6. Select the Realtime > Microscope > Calibrate > Scanner function to display the Scanner
Calibration dialog box.
7. Select the Y slow sens parameter.
8. Multiply the quotient obtained earlier by the Y slow sens value shown on the Scanner
Calibration panel.
9. Enter the new value to adjust the scanner’s slow axis to more closely match calculated
distances with actual feature distances.
10. To save the new parameter value, click
OK
.
Known distance between features
SPM-calculated distance between features
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