Veeco Dimension 3100, Руководство пользователя

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Calibration
Linearity Correction
Rev. D Dimension 3100 Manual 317
9. Align one side of the zoom box with desired features and observe how the other side aligns
with the features under it.
10. Compare the beginning third of the scan to the features in the end third of the scan. If the
features are too large to fit an equal number inside the zoom box, decrease the Fast mag0
value. If the features are too small, increase the Fast mag0 value. Change Fast mag0 by
about 0.1 to 0.3 units at a time.
11. The entire scan axis is affected each time a parameter changes, so after every change, resize
the zoom box at the beginning third of the scan and compare again with the end third.
Figure 17.4a Fast Scan Linearization: Mag0
Adjusting Fast arg
1. Once the beginning third of the scan is equal to the end third, check to see if the center needs
adjusting.
2. If the center features are too large for the box, decrease the Fast arg value. If the center
features are too small, increase the Fast arg value. Change arg s by 0.2 to 0.5 units at a time.
3. Changes affect the entire scan, so continue to resize the zoom box after each change.
4. After an adjustment in Fast arg is made, Fast mag0 may need readjusting. Repeat Fast
mag0 adjustment procedure until the rulings are evenly spaced across the Fast-axis.
Figure 17.4b X Scan Linearization
Mag0 Too Large Mag0 Too Small
Center Compressed Center Expanded