Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
13
3.4 Inlet port Piping
Provide main valve, vacuum gauge and leak valve between the vacuum chamber and pump, as shown in Fig. 5.
Use the flange for connection between the Pump Inlet and the piping.
MODEL Flange at the pipe
VS1501
VF80
JIS B 2290:1998
Vacuum technology-Flange dimensions;
Attachment book (Reference)
Flange dimensions for maintenance
VS2401
Wash sufficiently inside the Vacuum chamber, pipes, Main valve and so
on to connect them to the Pump. If dirty unit were connected, it would
cause a trouble such like raise the ultimate pressure or extend the
depression time to the specified pressure. Wear a pair of gloves to touch
any vacuum section. Do not touch with the bare hand.
Pay a full attention to completely clear the welding scale and/or rust
inside the pipe. If obliged to conduct a welding work close to or on the
inlet, take a measure such as to remove the Pump unit or put a cover
sheet on the inlet in order not to allow any foreign substance enter
inside.
Should the Pump sucked the water or substance such as dust, powder
and so on, it would impair the ultimate pressure and further cause a
trouble.The Pump has a really slight clearance to keep rotation and
easily gets impossible to rotate by any foreign substance entered inside.
Clear the sand completely after having sand blasted the vacuum
chamber.
Pay attention not to give damage to the Flange sheet face, Gasket slot
or gasket itself.
Metal mesh on the Suction inlet is put to keep foreign substances away
from the Pump unit. Be sure not to take it off unless necessitated so to
check it.
Use a pipe having bellows between the Vacuum chamber and inlet of the
Mechanical Booster Pump so as to avoid any direct load to the Pump
flange and not to transfer the Pump vibration to the Vacuum chamber.
Put the Main valve, Vacuum gauge and Leak valve between the Vacuum
chamber and the Pump
You should put the Leak valve closer as possible to the Main valve in
order to prevent the oil from rising up to the Vacuum chamber when the
Pump stopped.
If you use it together with the mechanical booster pump, be sure to put
the valve above the Pump.