Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
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6.2.1 Pump Oil Level Check
The pump oil level should be between the two level lines (MAX and MIN on the pump case)
on the oil level gauge. (Refer to the ” Fig. 4 Lubrication and water piping drawing”.)
6.2.2 Vacuum Pump Oil Check
The vacuum pump oil will be gradually deteriorated not only by contamination with sucked gas,
but also by temperature rise during pump operation. Check the oil for contamination and
viscosity and discoloring periodically.
If substances of low boiling point (water, organic solvent, etc.) are mixed with pump oil or
sludge collects on the bottom of the pump case, the ultimate pressure cannot be recovered by
one oil change, but the oil must be changed several times.
If the pump is operated using pump oil containing much moisture content, the ultimate
pressure will rise, leading to poor functioning of the mechanical friction parts of the pump. In
the worst case, the pump will seize up and cannot be rotated.
Table 6 gives a guide for pump oil change frequency.
Table. 6 Recommended replacement cycle of the vacuum pump oil
Purpose Replacement timing
Vacuum system for study / laboratory, small vacuum system Within 6 month ~ 1 year
Vacuum system for production, vacuum evaporation Within 3 ~ 6 month
Vacuum valve exhaust system, large vacuum evaporation system Within 3 month
Metallurgy vacuum system such as thermal treatment, melting and the like Within 1 month
High vacuum dry, vacuum impregnation, vacuum formation and vacuum
packing system
Within 1 month
Low vacuum dry, pug mill and food packing system Within 1 week