Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
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6.2.3 Replace Vacuum Pump Oil
Proceed as follows.
(1) Shut down the pump and open the drain valve to drain the oil in the pump case.
Upon completion of draining the oil, close the drain valve again and run the pump under no
load for approx. 5 seconds to drain the oil from the cylinder.
(2) Close the drain valve and fill fresh oil through the oil filling port. (Refer to Fig. 4.)
Pour oil until the oil level comes between the two level lines of the oil level gauge (MAX
and MIN on the plate for the casted lines on the pump case).
(3) If the oil is severely contaminated, fill fresh oil and run the pump for several minutes under
no load to clean the pump interior. Repeat this operation several times depending on the
degree of oil contamination.
(4) After changing the oil with fresh oil, run the pump to warm it up and then check the ultimate
pressure.
(5) If the specified ultimate pressure cannot be attained by oil change, sludge or other deposit
may have collected on the bottom of the pump case. In that event, overhaul is required.
Contact your local ULVAC organization or representative.
DANGER
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed by the vacuum pump.
If the Pump was used to exhaust the toxic gas, the Pump oil as well as
the Pump unit shall become toxic. Pay a full attention.
CAUTION
Read “1. 2 Chemical Material Safety Data Sheet” previously before
starting lubrication.
Please obtain the latest version of Safety Data Sheet (SDS) from our
Sales Department.
Weal protective gears such as rubber gloves, protective goggle and so
on.
Should the oil touched to your hand are entered in your eye, immediately
follow the emergency treatment described on the SDS.
CAUTION
Ensure to use the vacuum pump oil designated by ULVAC. Operation
using oil other than designated shall be out of our scope of guarantee
as it might impair the Pump performance and shorten the life cycle.