Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
3
1.1.5 Caution High temperature
Factors Avoidance methods and measures
Getting burnt on touching the high
temperature part.
The Pump gets high temperature during
operation.
Pump unit :70°C(during unloaded operation)
:80°C (when used the Gas ballast)
Motor :70°C
As the surface temperature is high, you have
a risk of getting burnt by accidentally
touching it with the hand or the like. Refrain
from touching the pump during operation.
Wait until the temperature sufficiently cools
down after having stopped the pump to
conduct check or something.
Do not touch the Pump unit or the Motor
when operating the Gas ballast port.
1.1.6 Caution Leakage of hot coolant
Factors Avoidance methods and measures
Kept operating without supplying
the Coolant. Boiled hot vapor jet out
the Coolant outlet.
Put a Flow meter in the line to set the
interlock so that the Pump stops when
Coolant was blocked out.
If you kept operating without supplying the
water, immediately stop the Pump and keep
away from it.
Stop the Pump and ensure that the Pump
temperature got cooled down to take out
the Pump and check it.