Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
iii
0.3 Safety Precautions
Descriptions are given as the method to keep away from danger and actions that must be
restricted on the use of the product.
Use of this product and this Instruction Manual.
IMPORTANT
Please read this Instruction Manual before starting installation, operation
check or maintenance of this product to use it in long term. You are
requested to fully understand the safety precautions, specifications and
operation methods of this product.
DANGER
Use of the toxic, combustible or combustion susceptible gas other than
inactive gas is not allowed as there is a risk of leakage of the gas from the
Pump unit if it was exhausted by the vacuum pump.
DANGER
Pump oil as well as the Pump unit becomes toxic should the toxic gas was
sucked in the vacuum pump. Pay attention to execute maintenance work.
DANGER
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed as there is a risk of
causing fire or explosion inside the Pump unit if it was exhausted by the
vacuum pump.
We would be obliged to refrain from handling and/or executing
maintenance of the product if the detail of used hazardous substance was
not disclosed or the product has exhausted such substance that the
detoxification process is hardly conducted.
WARNING