Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
ii
IMPORTANT
Author's copyright of this instruction manual belongs to Components
Division of ULVAC, Inc.
It is prohibited to copy a part and/or this entire manual without
authorization by Components Division of ULVAC, Inc.
It is prohibited to use this instruction manual except for explanation
when using the VS1501, VS2401 and other purpose Components Division
of ULVAC, Inc. agreed.
It is prohibited to hand over and disclose this instruction manual to third parties
without agreement by Components Division of ULVAC, Inc.
0.1 Safety Symbol Marks
We display symbol marks regarding the safety in this manual and on the product to make clear
items to observe. Descriptions attached to the symbol are classified as illustrated below;
0.2 Meanings of Safety Symbol Marks
DANGER
If the user makes a mistake in handling, it indicates an imminent
possibility that the user is subject to death or heavy injury.
If the user makes a mistake in handling, it indicates a possibility that the
user is subject to death or heavy injury.
IMPORTANT
[IMPORTANT] description shall be given where there is particular
information to notice for the operation or maintenance work of the
product.
Training for the electrical safety is required as there is a risk of electrical
shock.
Check and ensure that the pump is sufficiently cooled down as this
section keeps high temperature after having stopped the pump.
If the user makes a mistake in handling, it indicates a possibility
that the user is subject to moderate injury or it leads to significant damage
of the machine. It indicates a possibility that damage of the machine is
caused and the normal operation is impaired.
WARNING
CAUTION