Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
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6.2.4 Oil Leak Check
The Pump system needs repair if occurred any oil leak from the Shaft sealing or Pump unit.
Type of the seals and O-rings are listed at the end of this document. Please contact the Service
Center close to you for purchase and repair.
6.2.5 Checking The Gas Ballast Function
When used the Gas ballast function, there might occur clog in the Needle valve attached to
the Gas ballast port or in the introduction passage inside the Pump by the dust or the like. You
should regularly check whether the air is breathed in through the port.
6.2.6 Checking The Metal Mesh at The Suction Inlet
The Suction inlet might be clogged by the dust contained in the gas breathed in from the
Vacuum chamber and thus the Pump performance might be impaired. Further it is anticipated
that any welding scale drops off in the pipe particularly at the beginning of the system start.
Be fully cautious.
6.2.7 Checking The Noise and Abnormal Vibration
Checking around the pump
(1) Check whether bolts and nuts and the like fixing the pump are loose or not.
(2) Check whether pipes connected to the inlet/outlet are loose or not.
(3) Check and ensure that there is no leakage from the piping and valves.
Checking the pump
Please refer to the “6.5 Trouble check list.”
Should the condition was not recovered after having checked points indicated there, please
contact the closest Service center.
6.2.8 Checking The Coupling and Spider
The spider of the coupling that connects the pump body and the motor is made of rubber.
Replace it if the spider is damaged.
Replace it once a year by rule of thumb. If the pump is started and stopped several hundreds
of times a day, however, shorten the replacement frequency.
To replace the coupling spider, proceed as follows.
(1) Stop the pump and turn OFF the Power Supply. Disconnect the power cable of the motor.
(2) Use a wrench to remove the M12 hexagon head bolt x 4 and spring washer x 4 and plain
washer x 4 fixing the Motor.
(3) Remove the motor from the pump unit.(Do use crane to Remove the motor.)
(4) Now you can check the spider of the coupling. Replace the spider with a new one.