Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
46
Trouble Causes Processing method Reference
Pressure does not
come down.
(1) Pump exhaust capacity
is smaller compared to
the Vacuum chamber
capacity.
(2) Pressure measurement
method is wrong.
(3) Vacuum gauge is not
appropriate.
(4) Pipe connected to the
Suction inlet is thin or
connection distance is
long.
(5) Metal mesh at the
Suction inlet is clogged.
(6) Oil is not supplied to the
specified volume.
(7) The oil is deteriorated.
(8) There is a leak in the
pipe connecting with the
Pump.
(9) Not using the ULVAC
genuine oil.
(1) Select another Pump type.
(2) Measure correctly the
pressure.
(3) Use the Vacuum gauge that
matches the measurement
pressure range and correctly
calibrated one to measure
the pressure.
(4) Connect a pipe wider than
inlet diameter and shorten
the connection distance
between the Vacuum
chamber.
(5) Remove the pipe above the
inlet and wash the mesh.
(6) Supply the oil to the
specified volume.
(7) Replace the oil.
(8) Use a Leak detector or the
like to find out the leak
position and stop it.
(9) Conduct the overhaul of the
Pump and replace the oil
with the ULVAC oil.
5.1
6.2.5
3.2
6.2.1
3.2
6.2.3
3.4
3.2
6.2.3