SK00-4390-DI-002-11
i
0. Before Using This Product
We thank you very much for purchasing our product.
You are kindly requested, upon delivery of the product, to check that the delivered product is
exactly what you have ordered and it has no damage caused by transport or the like.
This manual gives description on operation and maintenance procedure appropriate to use the
product in safe and effective way. Please read this manual beforehand to correctly use the Pump.
You are requested to install and operate the product in compliance with the laws and regulations
relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on in the country
and region you use the product. Consequently you shall be requested to attend general safety
lectures officially effective in the area, such as electrical safety, Cargo handling safety and so on.
Note that any person not attended such lectures shall be restricted from handling the product.
Operators shall need to attend such kind of training and have special knowledge, skill and title
regarding the electricity, machinery, cargo, vacuum and so on.
This product is designed to conform to regulations valid at the time of issue of this manual and its
conformity is not ensured if any of regulations shall be changed in the future.
The performance and safety of the product might not be ensured if any of the devices put together
did not conform to same regulations or the product itself was modified. ULVAC shall be not liable
to guarantee performance and safety in such cases above. Any modification of the product by the
user is out of the scope of guarantee by us and not be guaranteed in any manner.
Be sure to clear any energy sources, e.g. electricity, coolant and so on of the product before
installing or removing the product.
Please note that any of the parts used in this product shall keep the performance at the time of
the shipment but shall not survive eternally. Any of the parts cannot, under any application
supposed under socially-accepted idea, help but inevitably deteriorate its performance and get
easily result in causing trouble of the product. You are kindly requested consequently to take your
application situation into consideration and help yourself to implement the protective maintenance
so as to avoid troubles.
Through implementation of the protective maintenance, you shall reduce occurrence of the trouble
due to wear and/or failure of the part and bring reducing the occurrence of the downtime caused
by the product trouble and fire as well as a risk of affecting the another process.
We would like to ask you again to establish the protective maintenance plan as well as conduct
the part replacement and overhaul in accordance with such a plan.
Please do not hesitate to contact our sales office or agency closest to you or the Components
Division if you had any question or unclear on the use.
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