Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
15
DANGER
Use of the toxic, combustible or combustion susceptible gas other than
inactive gas is not allowed as there is a risk of leakage of the gas from
the Pump unit if it was exhausted by the vacuum pump.
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed as there is a risk of
causing fire or explosion inside the Pump unit if it was exhausted by the
vacuum pump.
It is not allowed to use any corrosive gas other than inactive gas as it
might cause corrosion and/or give damage on pump parts when
discharged through vacuum pump.
Be sure to use pipes made of metal (electricity-conducting material).
Ensure also to take a grounding
If to exhaust any combustible, combustion susceptible or corrosive gas,
be sure to use pipes made of high pressure withstanding and corrosion
resistant metal. Ensure also to take a grounding.
In the case of the process flowing combustible gas/susceptibility of
substances to burn gas, you are requested to introduce the diluent gas.
Flow the diluent gas from the intake side so that the gas concentration to be
exhausted becomes lower than the explosion limit.
WARNING
If the pipe connected to the outlet had a small diameter or attached
foreign substance inside, it might raise the pressure inside the pipe and
impair the Pump operation. A caution shall be required.
There is a risk that the pressure inside the Vacuum pump rises up to
cause break or oil leak of the casing or Oil level gauge resulting in
overload of the motor.
CAUTION
Pay attention not to give damage to the Flange sheet face, Gasket slot
or gasket itself.