Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
44
6.5 Trouble Check List
Table. 7 Trouble check list
Trouble Causes Processing method Reference
The Pump does not
run.
(1) Motor connection is wrong.
(2) Safety circuit such as the
Electromagnetic breaker is
not correctly set.
(3) Oil viscosity got higher.
(4) Foreign substance entered
in the Pump caused
burning the Rotor or the
like.
(5) Reactive agent
accumulated inside the
Pump while the Pump was
stopped after having
exhausted the reactive gas.
(1) Check the connection.
(2) Make the Safety circuit
conform to the Motor
specification.
(3) Replace the oil.
(4) Conduct the overhaul
(replacement of the
Cylinder, Rotor, Cover
and so on.)
(5) Conduct the overhaul
(cleaning inside the
Pump, removal of
reactive agent and so on.)
3.6
3.6
3.2 , 4.5
6.2.2
Trouble Causes Processing method Reference
Abnormal noise
sounds.
(1) Motor rotation direction
is reverse.
(2) Slow leak valve is
clogged.
(3) Rattling sounds on
starting or stopping the
machine.
(1) Do the connection again
to correct the rotation
direction.
(2) Remove the Side panel
and wash and adjust the
Slow leak valve.
(3)There is no particular
problem as it’s a
phenomenon caused by
vanes that temporarily
make irregular motions.
3.6
6.2.10