Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
14
3.5 Outlet port Piping
Use the flange for connection between the Pump Outlet and the piping.
It is recommended to provide an oil mist trap to reduce oil consumption and to trap oil mist.
MODEL Flange at the pipe
VS1501
VF50
JIS B 2290:1998
Vacuum technology-Flange dimensions;
Attachment book (Reference)
Flange dimensions for maintenance
VS2401
Exhaust piping is classified mainly to following three types;
(1) Piping with the Oil mist trap
The Oil mist trap shall be put so as to prevent the oil mist from going out of the
Exhaust outlet. It is imperative to put the Oil mist trap for the high suction pressure
(10kPa – atmospheric pressure) continuous operation. Further it is also required to
collect the oil pooled in the trap to decrease the oil consumption. (Refer to Fig. 2
and 3 Oil mist trap return port.)
Use the Tester to do cable check between the Oil mist trap unit (or the Exhaust
outlet flange) and Grounding in the Motor terminal box of the Pump.
(2) Oil mist trap + Duct piping
In case where required to keep a cleaner room environment such as the Clean
room, put the Oil mist trap and install the Duct from its outlet.
(3) Duct piping
Where required to keep the room environment as in (2) above, install the Duct. You
should cause measures to avoid such problems as oil splash to the Duct piping and
oil consumption on the high suction pressure continuous operation. Ensure to use
the Duct made of electricity-conducting material.