Ulvac VS1501, Инструкция по эксплуатации

Страница: 45 / 77

SK00-4390-DI-002-11
25
4.3 Operation Stop
(1) Close the Vacuum valve at the Suction inlet and stop the Pump unit.
(2) After the Pump stop, open the Leak valve and return the pressure inside the Pump to the
atmospheric pressure.
CAUTION
The Vacuum pump gets high temperature (70°C ~ 80°C) during operation.
Refrain from touching the Motor and Pump unit until the Pump cools down
after having stopped operation.
CAUTION
Ensure to close the Vacuum valve and open the Leak valve to stop the
Pump. if failed in following this procedure, the Pump cylinder gets filled
with the oil in several minutes, which might make difficult to restart
operation or give damage to the Pump unit.
Further the oil might accidentally flow back to the Vacuum tank.
If failed in closing the Vacuum valve, the vacuum might leak from the
Exhaust side through the Pump unit.
(3) Discharge the water inside the Cylinder jacket if the ambient temperature came down
under 5°C during the operation stop. (Supply the compressed air 0.3 MPaG (Gauge
pressure through then Coolant inlet without closing the water outlet.) Water remaining
inside the jacket might freeze up and potentially cause crack on the cylinder.