Ulvac VS1501, Инструкция по эксплуатации

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SK00-4390-DI-002-11
48
Trouble Causes Processing method Reference
Pump surface
temperature is
abnormally high.
Room
temp60°C
or more
(5) The oil is not circulating.
a) Oil pit of the Cover or
the like is clogged.
b) Oil disturb
(6) Area around the Pump
is enclosed.
(5) Overhaul
a) Clean the oil pit.
b) Check and repair the Oil
distributor valve.
(6) Make the ventilation
available.
Lot of oil mist
blowing out of the
Exhaust outlet.
(1) Pump is filled over the
specified volume.
(2) Keeping continuous
operation under high
suction pressure
(3) Exhaust valve vane is
broken.
(4) Oil mist trap is clogged.
(1) Drain the oil until it gets the
specified volume.
(2) Put the Oil mist trap on the
Exhaust side.
(3) Replace the Exhaust valve
vane.
(4) Replace the Filter element.
3.2
6.2.2
3.5
6.2.11
6.2.9
Oil leak outside the
Pump
(1) Deterioration of the O-
ring and/or Oil seal of
the Case and Cover.
(2) Oil inlet is loose.
(1) Check the O-ring and Oil
seal. Replace them if
necessary.
(2) Tighten again the Oil inlet.
6.2.4
Water leak outside
the Pump.
(1) Deterioration of the
O-ring and/or gasket of
the Cover.
(2) Coolant joints and so on
got loose, or not tighten.
(3) Sealing of Plugs and
the like is not sufficient.
(1) Check the O-ring and
Gasket. Replace them if
necessary.
(2) Check and repair Joints and
so on.
(3) Check and repair Plugs and
so on.