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Program 14 "Air leakage Test”
This program is intended to test air leakage to chamber through the door seal
or any other seals.
This test is performed in vacuum phase.
Performance description:
Vacuum is built up in the chamber down to 10kPa. At this stage all valves and
motors are shut.
A period of 5 minutes is counted to enable stabilization of pressure.
During the next 10 minutes the pressure is monitored.
The allowable change of pressure during these 10 minutes is 1.3kPa.
Содержание 2301006
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