MKS MKSINST IE1000A, Инструкция по эксплуатации

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Table of Contents
iv
How This Manual is Organized ...................................................................................................................... 13
Chapter One: General Information .............................................................................................................. 14
Introduction ................................................................................................................................................................. 15
How the MFC Works .................................................................................................................................................. 15
Operation of the MFC with Gases other than Air ........................................................................................................ 16
Chapter Two: Installation ............................................................................................................................. 19
Unpacking the IE1000A Mass Flow Controller .......................................................................................................... 19
Verifying Use Requirements Prior to Installation ....................................................................................................... 19
Understanding Dimensional Constraints ..................................................................................................................... 20
Performing MFC Installation ....................................................................................................................................... 23
Chapter Three: Operation ............................................................................................................................. 25
Analog IO 15-pin Interface Operation ......................................................................................................................... 25
4-20 mA IO 15-pin Interface Operation ...................................................................................................................... 28
General Operational Functions .................................................................................................................................... 30
Chapter Four: Maintenance and Troubleshooting ..................................................................................... 33
General Information .................................................................................................................................................... 33
Zeroing the MKS IE1000A High Flow Rate Mass Flow Controller ........................................................................... 33
Customer Support ........................................................................................................................................................ 36
Repair .......................................................................................................................................................................... 36
Troubleshooting ........................................................................................................................................................... 37
Chapter Five: Diagnostic Interface Setup, Configuration, and Operation ............................................... 40
Step 1: Install the Java™ Plug-In ................................................................................................................................ 41
Step 2: Configure TCP/IP Settings for Communication to IE1000A .......................................................................... 42
Step 3: Connect to the IE1000A High Flow Rate Mass Flow Controller .................................................................... 45
Monitor Mode .............................................................................................................................................................. 46
Setup Mode .................................................................................................................................................................. 51
Appendix A: Product Specifications ............................................................................................................. 61
Performance Specifications ......................................................................................................................................... 61
Physical Specifications ................................................................................................................................................ 61
Environmental Specifications ...................................................................................................................................... 62
Electrical Specifications .............................................................................................................................................. 62
Appendix B: Model Code Explanation ......................................................................................................... 63
Model Code Description .............................................................................................................................................. 63
Appendix C: Health and Safety Form .......................................................................................................... 67