MKS MKSINST IE1000A, Инструкция по эксплуатации

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Setup Mode Chapter Five: Diagnostic Interface Setup, Configuration, and
Operation
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Optional Input Kp, Optional Input Ki, Optional Input Kd: These values are the PID parameters for Optional
Input control. Typically these will be set to match the standard Kp, Ki and Kd values that are factory set
before shipment. For information on how to tune your MFC for optimal performance please see
Tuning the
MFC for Optional PC in the following section . This section discusses tuning the standard PID values, but the
same rules apply to the optional input parameters. To set any of these parameters you must click the
“Submit” button. You can also set these parameters on the Plot Page.
Note
A MFC is typically used as a PI controller only. If the derivative term (Kd) is going to be used, it
is recommended that you increase the value in increments of 0.001.
Setup Mode / Optional PC / Changing the Optional Input Full Scale Voltage
In the Optional Input Full Scale Voltage section of the page you have the ability to tell the

MFC whether or
not the Optional Input signal has a full scale voltage of 10 Volts ( default ) or 5 Volts. To change the voltage
click the correct option box and then click the “Submit” button located directly above this section.
Setup Mode / Optional PC / TCP/IP Info
On this page you are only allowed to view the current TCP/IP info for the MFC.
Optional PC and the Plot Page
Once you enable the Optional Input the Plot Page will include it in the variable list. A screen capture of the
Plot Page with the Optional Input enabled is shown below. You can see the “Optional Input” variable listed in
the variable list.