MKS MKSINST IE1000A, Инструкция по эксплуатации

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Appendix A: Product Specifications Performance Specifications
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Appendix A: Product Specifications
Performance Specifications
Full Scale Flow (N
2
equivalent) 250 to 500 slm IE500A
501 to 1000 slm IE1000A
Max Inlet Pressure 150 psig
Normal Operating Pressure Differential
(ATM pressure @ MFC outlet port)
40 - 50 psid (dependent on fitting type)
Burst Pressure 1500 psig
Control Range 2 to 100% F.S.
Accuracy

1.00 % RDG from > 20% to 100% F.S. (CDA cal gas)

0.25 % FS from 5% to 20% FS (CDA cal gas)
Repeatability

0.5 % RDG
Resolution

0.1 % RDG
Temperature Coefficient
Zero
Span
 
0.05% FS /

C
 
0.08% RDG /

C
Inlet Pressure Coefficient
<

0.02% RDG / psig
Controller Settling Time
(SEMI E17-0600)
< 3 s typical for setpoints above 10 % FS @ 50 psi
Warm Up Time
(< 0.2 % FS of steady-state performance)
one (1) hour
Leak Integrity
Internal to external
Through closed control valve
< 1 x 10
-9
scc/sec He
< 1% FS (40 psia to vacuum less than 500 mTorr)
Physical Specifications
RoHS Compliant Yes
CE Compliant EMC Directive 2004/108/EEC
Dimensions
6.67” L (face) x 3.3” W x 6.5” H
Weight ~ 12.7 lbs (5.8 kg.)
Fittings
8 VCO Male 8 VCR Male
12 mm Compression 1/2" Compression
3/4" Compression
1/2" NPT Female
3/4" NPT Female
Surface Finish
16

in Ra (average)
Valve Type Normally closed
Wetted Materials 316L SS, Elgiloy, KM-45, PTFE
Buna-N, Viton, Neoprene, EPDM