MKS MKSINST IE1000A, Инструкция по эксплуатации

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Chapter One: General Information Operation of the MFC with Gases other than Air
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The IE500A / IE1000A High Flow Rate Mass Flow Controller is calibrated with clean, filtered, dry air rated
to stringent ISO standards for compressed air systems. When running with air, humidity may have a minor
effect (usually < 1%) if the dew point is allowed to rise above 0 ºC in the flowing gas stream.
Control (I/O) Interfaces
The IE500A / IE1000A High Flow Rate Mass Flow Controller is available with either analog or 4-20 mA I/O
which is specified by the user at time of ordering.
Analog I/O is available via an industry standard 15 pin DSUB connector, which provides for setpoint I/O,
valve override, flow zero, and an optional feedback control input. Analog I/O pin functions are covered later
in this manual.
Cleanliness Features
The IE1000A High Flow Rate Mass Flow Controller uses elastomer o–rings available in Viton, BUNA-N,
neoprene, and EPDM for all external seals. The seals minimize gas permeation and ensure low external
leakage. Internal surfaces are precision machined and subjected to a proprietary cleaning process. The
instrument is assembled and packaged in a clean room environment.
Reliability
To enhance instrument reliability, the design minimizes mechanical and electronic components count and has
successfully passed the following tests:

High speed main flow diaphragm cycling

High speed main flow valve plug cycling with post-cycle wear examination

Storage temperature testing

Repetitive thermal cycle and thermal shock testing

Transportation package testing

HALT testing

Full unit accelerated life testing

CE testing including ESD and EFT

Vibration testing (random and sine sweep)

Humidity testing

IP66 Testing

STRIFE, including temperature cycling and vibration (sine and random tests)
And with a metal braided, shielded cable, properly grounded at both ends:
EMC Directive 89/336/EEC for CE Mark compliance