MKS MKSINST IE1000A, Инструкция по эксплуатации

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Chapter Four: Maintenance and Troubleshooting Zeroing the MKS IE1000A High Flow Rate Mass Flow
Controller
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b) Wait 20 seconds while the mass flow controller performs the zero adjustment process.
c) Verify that the zero offset has changed.
OPTION 2: Diagnostic Interface
a)
Connect to the MFC using the embedded diagnostic interface
b) Enter the Setup Mode and go to the Configure Page
c) Press momentarily the “Zero Flow” button on the screen.
d) Wait 20 seconds while the mass flow controller performs the zero adjustment process.
e) Verify that the zero offset has changed.
The flow sensor within the mass flow controller is now re-zeroed and the unit ready for use. Cycling power is
not necessary for the new flow zero values to be in effect.
4-20mA IO Mass Flow Controllers
OPTION 1: 4-20 mA DSUB Interface (15-pin only)
a)
Pull Pin 13 to ground for three (3) seconds.
b) Wait 20 seconds while the mass flow controller performs the zero adjustment process.
c) Verify that the zero offset has changed.
OPTION 2: Diagnostic Interface
a)
Connect to the MFC using the embedded diagnostic interface
b) Enter the Setup Mode and go to the Configure Page
c)
Press momentarily the “Zero Flow” button on the screen.
d) Wait 20 seconds while the mass flow controller performs the zero adjustment process.
e) Verify that the zero offset has changed.
The flow sensor within the mass flow controller is now re-zeroed and the unit ready for use. Cycling power is
not necessary for the new flow zero values to be in effect.
Notes:

The flow zero adjustment is executed by the instrument by comparing current flow sensor reading with
the zero flow reading stored during initial calibration. The difference in these values is stored in a unique
register in the instrument EEPROM. On start-up, this value loaded into memory and added or subtracted
from all readings during operation.
 Because this operation offsets all readings from the flow sensor, the user must be certain that a true
zero flow condition exists before enabling the function.

If the difference between the “at calibration” and “at zero adjust” flow sensor values is greater than 3% of
the flow sensor full scale, the zero adjust will not be performed.