MKS MKSINST IE1000A, Инструкция по эксплуатации

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How This Manual is Organized
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How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate an IE500A / IE1000A
High Flow Rate Mass Flow Controller.
Before installing and/or operating your IE500A / IE1000A High Flow Rate Mass Flow Controller,
carefully read and familiarize yourself with all precautionary notes in the
Mass Flow Device Safety
Information section at the front of this manual. Observe and obey all
WARNING
and
CAUTION
notes
provided throughout the manual.
Chapter One: General Information introduces the product and describes the basic theory of operation.
Chapter Two: Installation explains the environmental requirements and describes how to mount the
instrument in your system.
Chapter Three: Operation describes how to use the instrument and explains all the functions and features.
Chapter Four: Maintenance and Troubleshooting lists any maintenance required to keep the instrument in
good working condition and provides a troubleshooting reference should the instrument behave unexpectedly.
Chapter Five: Diagnostic Interface Setup, Configuration, and Operation provides information on how to set
up the instrument’s auxiliary diagnostics and monitoring interface. It also provides information on how to
monitor the device during operation.
Appendix A: Product Specifications lists the specifications of the instrument.
Appendix B: Model Code Explanation describes the model code.
Appendix C: Health and Safety Form provides a copy of the safety form (at the time of this manual’s
release) which must be filled out prior to return of the instrument to MKS for calibration, routine
maintenance, or repair. Failure to include the form with a returned shipment will delay processing at the MKS
Calibration and Service Center.