MKS MKSINST IE1000A, Инструкция по эксплуатации

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Setup Mode Chapter Five: Diagnostic Interface Setup, Configuration, and
Operation
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Setup Mode / Device Page
In “Setup Mode” this page gives you the ability to modify the gas settings.
Figure 20: IE1000A Embedded Interface (Setup Mode / Device Page)
Gas Settings: The Device Page enables the user to change the MFC’s gas settings. To change the gas settings
review the following possible operations on the following pages.
o
To create a new gas instance
o
To change the full scale range of the current gas instance
o
To set the MFC to a different gas instance
Setup Mode / Device Page / Creating A New Gas Instance
(Refer to figure below during the following steps.)
In the “Create A Gas” section of the Device Page:
1. Click on the “select gas” drop-down menu arrow and find the gas you’d like to create.
2. Click on the “select instance” drop-down menu arrow and find an instance that says “No Gas.” Please
note that you can write or re-write to any instance except instance 32, which is the Factory calibration.
3. Press the “Submit” button.