MKS MKSINST IE1000A, Инструкция по эксплуатации

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Chapter Five: Diagnostic Interface Setup, Configuration,
and Operation Setup Mode
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Figure 26: IE1000A Embedded Interface (Setup Mode / Plot Page) Enabled Optional Input
The Optional PID parameters are always settable on the plot page, but they will have no effect unless the
Optional Input is enabled. If not already set, it is recommended that these values be set to the standard Kp, Ki
and Kd values initially. The following section discusses tuning the standard PID values, but the same rules
apply to the optional input parameters.
Note A MFC is typically used as a PI controller only. If the derivative term (Kd) is going to be used, it
is recommended that you increase the value in increments of 0.001.