MKS MKSINST IE1000A, Инструкция по эксплуатации

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Chapter Four: Maintenance and Troubleshooting General Information
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Chapter Four: Maintenance and Troubleshooting
General Information
In general, only minor periodic maintenance is required to keep the IE1000A High Flow Rate Mass Flow
Controller operating at maximum accuracy. Proper installation and operation of the IE1000A to the guidelines
presented previously will protect the instrument subsystems and ensure reliable operation over the life of the
device. Periodic maintenance activities should include visual checks for wear on the interface cable,
inspection of the enclosure for visible signs of damage, and periodic recalibration of the instrument.
Periodic recalibration of the instrument is required with a 1 year recalibration interval recommended. Refer to
the inside back cover of this instruction manual for a complete list of MKS Calibration and Service centers.
If an MKS IE1000A High Flow Rate Mass Flow Controller fails to operate properly upon receipt, check for
shipping damage, and check the interface cable for correct continuity, grounding, pin outs, and voltage levels.
Any damage should be reported to the carrier and MKS Instruments immediately. If there is no obvious
damage and the troubleshooting instructions fail to resolve the problem, obtain an RMA Number (Return
Material Authorization Number) and complete a Health and Safety Form before returning the unit to MKS
Instruments for service.
Zeroing the MKS IE1000A High Flow Rate Mass Flow Controller
For optimum performance, the zero flow output of the MFC should be periodically checked and reset, if
necessary. All MFCs should be zeroed under actual installation conditions prior to use. Very slight offsets in
the zero flow condition can contribute to flow measurement inaccuracy, which may be especially noticeable
at the lower end of the device range.
Warning If the instrument is being used to measure gases accurately, be sure that the
system is
fully warmed up before starting verification measurements.
Once the MKS IE1000A High Flow Rate Mass Flow Controller is completely warmed up for a minimum of
one (1) hour, it can be zeroed as required.
The Flow Zero Adjust feature integrated into the MKS IE1000A High Flow Rate Mass Flow Controller
allows the user to compensate for long term drift, universally present in analog sensor based flow instruments.
Approximately 0.25% of full scale zero drift per year is typical for the flow sensor specifications.
When to Use Zero Adjustment
Use of the flow zero adjust feature is appropriate when:

The instrument is first installed (or reinstalled) at the point of use in the process line
 The ambient temperatures at installation are >±10° from the temperature at calibration (nominally 25°C).

It is included as part of a preventive maintenance activity.
 Process output “drift” is identified that cannot be attributed to other causes (such as gas supply change),
applying
flow zero adjust to the IE1000A High Flow Rate Mass Flow Controller can be used as part of
diagnostic efforts.
It is not recommended to use flow zero adjust each time the instrument is idle. A flow zero adjust interval of 1
month should be more than adequate if the device has been left under continuous power. The components
used in the MKS IE1000A High Flow Rate Mass Flow Controller have a long history of usage and are
expected to comply with the specifications listed.