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Type IE500A / IE1000A

Mass Flow Controller

Instruction Manual

2 Tech Drive
Suite 201
Andover, MA 01810
978.645.5500
978.557.5100 FAX
www.mksinst.com

1052292-001 Rev A

07/14

MKSINST



Содержание MKSINST IE1000A

Страница 1: ...Type IE500A IE1000A Mass Flow Controller Instruction Manual 2 Tech Drive Suite 201 Andover MA 01810 978 645 5500 978 557 5100 FAX www mksinst com 1052292 001 Rev A 07 14 MKSINST...

Страница 2: ...rges with the MKS sales representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS home office in Andover Massachusetts USA This war...

Страница 3: ...1052292 001 Rev A 07 14 Type IE500A IE1000A Mass Flow Controller 2 Tech Drive Suite 201 Andover MA 01810 978 645 5500 978 557 5100 FAX www mksinst com...

Страница 4: ...c or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United Stat...

Страница 5: ...ung der am Ger t angebrachten Symbole 3 Sicherheitsvorschriften und Vorsichtsma nahmen 4 Informations de s curit pour appareils de mesure contr le de d bit massique 5 Symboles utilis s dans ce manuel...

Страница 6: ...30 Chapter Four Maintenance and Troubleshooting 33 General Information 33 Zeroing the MKS IE1000A High Flow Rate Mass Flow Controller 33 Customer Support 36 Repair 36 Troubleshooting 37 Chapter Five D...

Страница 7: ...Dialog Box 44 Figure 15 IE1000A Embedded Interface Monitor Mode Device Page 46 Figure 16 IE1000A Embedded Interface Monitor Mode Plot Page 48 Figure 17 IE1000A Embedded Interface Monitor Mode Diagnos...

Страница 8: ...ngebrachten Symbole 3 Tableau 3 D finition des symboles sur l unit 5 Tabla 4 Definici n de los s mbolos hallados en la unidad 7 5 9 6 11 Table 7 MKS Interface Cables 25 Table 8 Analog I O 15 pin DSUB...

Страница 9: ...TE sign denotes important information It calls attention to a procedure practice condition or the like which is essential to highlight Symbols Found on the Unit The following table describes symbols t...

Страница 10: ...l from a system be sure to purge the unit completely with a clean dry gas to eliminate all traces of the previously used flow material USE PROPER PROCEDURES WHEN PURGING This instrument must be purged...

Страница 11: ...r tes f hren kann Hinweis Das Symbol HINWEIS macht auf wichtige Informationen bez glich eines Arbeitsablaufs einer Arbeitsweise eines Zustands oder einer sonstige Gegebenheit aufmerksam Erkl rung der...

Страница 12: ...er vor dem Ausbau aus einem System muss das Ger t unter Einsatz eines reinen Trockengases vollst ndig gesp lt werden um alle R ckst nde des Vorg ngermediums zu entfernen Anweisungen zum Sp len des Ger...

Страница 13: ...n partielle ou totale du produit en cas d ex cution incorrecte ou de non respect des consignes Remarque L indication REMARQUE signale une information importante Elle attire l attention sur une proc du...

Страница 14: ...retrait d un syst me purger l unit compl tement avec un gaz propre et sec afin d liminer toute trace du produit de flux utilis pr c demment UTILISATION DES PROC DURES APPROPRI ES POUR LA PURGE Cet ap...

Страница 15: ...parcial del equipo Nota El s mbolo de notas indica informaci n de importancia Este s mbolo pone de relieve un procedimiento pr ctica o condici n cuyo conocimiento es esencial destacar S mbolos hallado...

Страница 16: ...ema purgue completamente la unidad con gas limpio y seco para eliminar todo resto de la sustancia l quida empleada anteriormente USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA El instrumento debe...

Страница 17: ...IEC 417 No 5008 IEC 417 No 5017 IEC 417 No 5019 IEC 417 No 5020 IEC 417 No 5021 IEC 417 No 5031 IEC 417 No 5032 IEC 417 No 5033 a 2 IEC 417 No 5172 a IEC 617 2 No 020206 ISO 3864 No B 3 1 ISO 3864 No...

Страница 18: ...10 MKS Instruments Inc MKS Calibration and Service Center...

Страница 19: ...5008 IEC 417 No 5017 IEC 417 No 5019 IEC 417 No 5020 IEC 417 No 5021 IEC 417 No 5031 IEC 417 No 5032 IEC 417 No 5033 a II IEC 417 No 5172 a 3 IEC 617 2 No 020206 ISO 3864 No B 3 1 ISO 3864 No B 3 6 IE...

Страница 20: ...12 MKS MKS Calibration and Service Center...

Страница 21: ...the instrument and explains all the functions and features Chapter Four Maintenance and Troubleshooting lists any maintenance required to keep the instrument in good working condition and provides a t...

Страница 22: ...14 This page intentionally left blank...

Страница 23: ...s interface that allows users to check MFC functionality without removing the MFC Increases uptime through reduction of No Problem Found MFC replacements Reconfigures quickly through auxiliary digital...

Страница 24: ...o decrease the amount of gas entering the system As the valve closes there is a reduced flow of gas entering the process so the flow rate decreases to meet the setpoint value The flow exits the instru...

Страница 25: ...ller uses elastomer o rings available in Viton BUNA N neoprene and EPDM for all external seals The seals minimize gas permeation and ensure low external leakage Internal surfaces are precision machine...

Страница 26: ...18 This page intentionally left blank...

Страница 27: ...ve all cardboard and shipment packaging materials away from the process connections where the device will be installed Do not discard UNTIL the device has been inspected for damage and determined to b...

Страница 28: ...ases supersedes the instructions in this manual Comply with your corporate policy MKS assumes no liability for the safe handling of such materials Provide a recommended 20 pipe diameters of rigid proc...

Страница 29: ...able drawings which follow Front and Rear Views The front of the IE500A IE1000A MFC has an arrow to indicate the direction of gas flow through the unit The back of the IE500A IE1000A MFC contains the...

Страница 30: ...Understanding Dimensional Constraints Chapter Two Installation 22 End View Figure 3 End View of the IE500A IE1000A MFC Top View Figure 4 Top View of the IE500A IE1000A MFC analog IO Interface...

Страница 31: ...n hazardous residuals if not properly prepared Consult with your facility safety engineers prior to working on any gas delivery system and notify all personnel in adjacent areas to take appropriate pe...

Страница 32: ...ify the leak integrity of both the process fitting connection and the fitting to main flow path connection prior to running process gas 7 Before connecting the cable leading to the MFC verify that all...

Страница 33: ...on cable to connect the MFC to a power supply with a 15 pin DSUB connector use part number CB259 5 for an overall metal braided shielded cable use part number CB259S 5 Analog I O User Supplied Shielde...

Страница 34: ...egrity is maintained once installed The mating connector and cable must use a backshell that meets a minimum of an IP66 rating There are several manufacturers of sealed backshells for DSUB connectors...

Страница 35: ...onal input pin Voltage applied to the optional input pin overrides the signal generated by the flow sensor internal to the MFC The control electronics drive the valve so that the optional input signal...

Страница 36: ...Pin 13 Flow Zero Pin 14 Chassis Ground Pin 15 No Connection Note 1 The No Connection pin assignment refers to a pin with no internal connection 2 The 4 20 mA flow signal output comes from pin 4 and i...

Страница 37: ...l Setpoint Control Therefore if the flow controller is operating under Setpoint Control you can send either a Valve Open command to force the valve to the full open position or a Valve Closed command...

Страница 38: ...response of the IE500A IE1000A Mass Flow Controller to changes in either optional input setpoint or system response Accessing PID Variables For most users editing PID variables is most readily accompl...

Страница 39: ...l with respect to time Therefore as time passes the integral term acts to position the valve to reduce the error signal to zero An increase in the integration time increases the period of time over wh...

Страница 40: ...ves adjusting the Proportional Integral and Derivative PID terms Since every system is different the optimum PID settings may vary Operating pressures process gas density and target setpoints all cont...

Страница 41: ...if necessary All MFCs should be zeroed under actual installation conditions prior to use Very slight offsets in the zero flow condition can contribute to flow measurement inaccuracy which may be espec...

Страница 42: ...es e Close the MFC s control valve f Wait one minute and adjust the zero using one of the methods specified for the device I O type later in this section OPTION 2 SYSTEM HAS DOWNSTREAM ISOLATION VALVE...

Страница 43: ...ed OPTION 2 Diagnostic Interface a Connect to the MFC using the embedded diagnostic interface b Enter the Setup Mode and go to the Configure Page c Press momentarily the Zero Flow button on the screen...

Страница 44: ...st com service servicehowtoorder aspx Note Returned instruments will not be accepted without a valid RMA number displayed on the shipping container Health and Safety Form A returned instrument will no...

Страница 45: ...or repair service per instructions above MFC does not respond to setpoint and reports near zero flow valve current is max 260 mA Upstream downstream pneumatic valves have not received adequate actuati...

Страница 46: ...ound After verifying supply pressure upstream of MFC provide valve override command to MFC and check for gas flow independent measurement downstream of MFC If flow does not exist then filter may be cl...

Страница 47: ...proper zero of MFC Inlet pressure too high Contamination particles trapped between valve plug and orifice Create known zero flow condition per SEMI approved procedure and re zero MFC to remove offset...

Страница 48: ...40 This page intentionally left blank...

Страница 49: ...500A IE1000A maintains the ingress protection rating of IP66 Removing and installing Ethernet interface cover Accessing the diagnostic interface a Remove QTY 3 6 32 sealing screws using Phillips head...

Страница 50: ...he following steps describe how to set up the host computer through its local area network connection 1 Connect a standard CAT 5 Ethernet network cable between the host computer and the MFC Note Older...

Страница 51: ...tion to IE1000A 43 Figure 11 Windows 7 Network Information Window 3 Double click on the local area connection to open the status window as shown below Figure 12 Windows 7 LAN Stats Dialog Box 4 Click...

Страница 52: ...ties which allows you to change the default IP address of the communication port Figure 14 Windows 7 IP Properties Dialog Box 7 Select Use the following IP Address 8 Enter a unique IP address Note The...

Страница 53: ...the IE1000A High Flow Rate Mass Flow Controller Before trying to connect to the IE1000A High Flow Rate Mass Flow Controller the communications network must be set up correctly Complete the steps list...

Страница 54: ...d below in detail Monitor Mode Device Page The Monitor Mode Device Page displays the general information for the MFC including the currently selected process gas instance SEMI gas number calibration g...

Страница 55: ...time now labeled Stop to stop the applet Monitor Mode Plot Page Options Trace Autoscroll Rescaling Y Axis Rescaling X Axis Save to File Below the Start Stop button you should see the Options section H...

Страница 56: ...sections are explained in detail below Monitor Mode Diagnostics Page Device Diagnostics The tests listed in this section are designed to insure that there are no major electrical problems and that th...

Страница 57: ...it is good If it fails then there may be a problem Figure 17 IE1000A Embedded Interface Monitor Mode Diagnostics Page Monitor Mode Configuration Page This Monitor Mode Configuration Page displays the...

Страница 58: ...Monitor Mode Chapter Five Diagnostic Interface Setup Configuration and Operation 50 Figure 18 IE1000A Embedded Interface Monitor Mode Configuration Page...

Страница 59: ...ange Settings button you will be directed to the Configuration Page in Setup Mode You should now a see a green banner that lines the top of the page that says The device is now in SETUP mode Each of t...

Страница 60: ...pages o To create a new gas instance o To change the full scale range of the current gas instance o To set the MFC to a different gas instance Setup Mode Device Page Creating A New Gas Instance Refer...

Страница 61: ...t button This operation typically takes less than one minute Figure 22 IE1000A Embedded Interface Setup Mode Device Page Changing Full Scale Flow Range Setup Mode Device Page Changing the Active Gas I...

Страница 62: ...the device to bypass the analog setpoint on the analog power interface To begin sending setpoints through the analog interface again either uncheck the Analog checkbox or close the browser Figure 23...

Страница 63: ...Adjustment procedure has been followed correctly To zero the flow press the Zero Flow button A green banner across the top of the page will tell you if the device received the command and is processin...

Страница 64: ...will reset the entry fields to what was in them prior to you making any changes For the new IP address to take effect the power to the MFC must be cycled To use the Embedded GUI you must now change th...

Страница 65: ...put must be disabled Figure 25 IE1000A Embedded Interface Setup Mode Optional PC Page Setup Mode Optional PC Enabling the Optional Input To enable the Optional Input check the Enable Optional Input bo...

Страница 66: ...PI controller only If the derivative term Kd is going to be used it is recommended that you increase the value in increments of 0 001 Setup Mode Optional PC Changing the Optional Input Full Scale Vol...

Страница 67: ...e no effect unless the Optional Input is enabled If not already set it is recommended that these values be set to the standard Kp Ki and Kd values initially The following section discusses tuning the...

Страница 68: ...Setup Mode Chapter Five Diagnostic Interface Setup Configuration and Operation 60 Figure 27 IE1000A Embedded Interface Calibration Sheet...

Страница 69: ...ent Zero Span 0 05 FS C 0 08 RDG C Inlet Pressure Coefficient 0 02 RDG psig Controller Settling Time SEMI E17 0600 3 s typical for setpoints above 10 FS 50 psi Warm Up Time 0 2 FS of steady state perf...

Страница 70: ...ange 0 to 95 RH non condensing Electrical Specifications 15 pin ANALOG Input Power 15 24 VDC 320 mA 24 VDC nominal Connector 15 pin DSUB Start up current first 5 sec Steady state current 15 VDC 5 2 A...

Страница 71: ...al Type Firmware Version Controller Type The type identifies your unit as a specific model IE500A or IE1000A MFC SEMI Gas Code GGG The gas which the MFC is intended to control is identified by its SEM...

Страница 72: ...ecimal The third digit is the power of 10 exponent Example 805 5 0 x 10 5 sccm 800 slm Mass Flow Rate Ordering Code 500 SLM 505 1000 SLM 106 FittingType Y The IE500A IE1000A High Flow Rate Mass Flow C...

Страница 73: ...ontroller s firmware version options are designated by a two digit number code Example The initial release of the IE500A IE1000A Mass Flow Controller uses firmware version 10 Firmware Version Ordering...

Страница 74: ...66 This page intentionally left blank...

Страница 75: ...Appendix C Health and Safety Form Model Code Description 67 Appendix C Health and Safety Form...

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