MKS MKSINST IE1000A, Инструкция по эксплуатации

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Appendix B: Model Code Explanation Model Code Description
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Appendix B: Model Code Explanation
Model Code Description
The model code of the IE500A / IE1000A High Flow Rate Mass Flow Controller defines features of the unit
such as interface type, process gas, flow range, seal configuration, and firmware revision.
The model code is identified as follows:
IE1000A GGG FFF Y C V 0 SS
where:
IE1000A GGG FFF Y C V 0 SS
Type
SEMI Gas Code
Mass Flow
Full Scale Range
Fitting Type
Interface Type
Seal Type
Firmware Version
Controller Type
The type identifies your unit as a specific model IE500A or IE1000A MFC.
SEMI Gas Code (GGG)
The gas which the MFC is intended to control is identified by its SEMI Gas Code. A partial listing is shown
below. The full list is shown in SEMI Document E052-00-0611 and may be found on the SEMI website,
www.semi.org, or a complete list shown on the MKS website at www.mksinst.com.
Gas Name SEMI
Code Molecular
Symbol
Acetylene 042 C
2
H
2
Air 008 Air
Ammonia 029 NH
3
Argon 004 Ar
Carbon Dioxide 025 CO
2
Carbon Tetrafluoride (R-14) 063 CF
4
Chlorine 019 Cl
2
Ethylene 038 C
2
H
4
Helium 001 He
Hydrogen 007 H
2
Hydrogen Chloride 011 HCl
Neon 002 Ne
Nitrogen 013 N
2