MKS MKSINST IE1000A, Инструкция по эксплуатации

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Verifying Use Requirements Prior to Installation Chapter Two: Installation
20

Provide a properly grounded electrical power source of sufficient current capacity between 15-24 V
DC

When unpowered, maintain storage temperature range between -20° to 65° C (-4° and 149° F).
Allow unit to return to normal ambient temperature for several hours prior to applying electrical
power.

Mount the IE500A / IE1000A Mass Flow Controller securely to a rigid base.

Provide a separate positive shutoff valve if your system cannot tolerate any leakage through the
IE500A / IE1000A High Flow Rate Mass Flow Controller. The internal pilot valve and main flow
control valve are not positive shutoff valves so some leakage across the valves may occur.
Warning Your corporate policy on handling toxic or hazardous gases supersedes the
instructions in this manual. Comply with your corporate policy. MKS assumes no
liability for the safe handling of such materials.

Provide a recommended 20 pipe diameters of rigid process line immediately upstream and
downstream of the MFC to minimize installation related acoustic noise propagation from the MFC.

Allow a warm up time of one (1) hour on power application prior to use.

Provide a gas filter to remove particulates and contaminants in process gas line upstream of the MFC

Observe the pressure limits for the flow device.
Max gas supply pressure: 150 psig
Min differential pressure: 40 psid
The standard valve configuration provides control over this differential pressure range with the outlet at
atmospheric pressure. If process conditions vary significantly from those listed, contact an MKS applications
engineer for assistance in tuning the unit for optimum performance.
For additional information, refer to the product specifications in Appendix A.