MKS MKSINST IE1000A, Инструкция по эксплуатации

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Chapter Two: Installation Unpacking the IE1000A Mass Flow Controller
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Chapter Two: Installation
Unpacking the IE1000A Mass Flow Controller
MKS has carefully packed your IE1000A High Flow Rate Mass Flow Controller so that it will reach you in
good working condition. Upon receiving the unit, however, you should check for defects, cracks, broken
connectors, etc., to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your inspection and are sure the
unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to
MKS, obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration and
Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS
Calibration and Service Centers.
Opening the Package
The IE500A / IE1000A High Flow Rate Mass Flow Controller is assembled, leak tested with helium, and
calibrated in a clean environment. The instrument is packaged in a polyethylene bag in this environment to
maintain its particle free condition during shipment. It is important to remove the shipment packaging with
clean practices to avoid unnecessarily contaminating the device with particulates. To maintain a minimal level
of cleanliness, follow the instructions below:
1. Remove all cardboard and shipment packaging materials away from the process connections where the
device will be installed. Do not discard UNTIL the device has been inspected for damage and determined
to be in good working order.
2. Wipe down the outer polyethylene bag with a clean cloth prior to proceeding.
3. Remove the outer polyethylene bag away from BOTH the shipping packaging AND the process
connections where the device will be installed. Do not allow this container near the process connections.
Verify the presence of the flow calibration sheet packaged with the unit.
4. Pass the flow calibration sheet to the appropriate personnel at your facility.
5. At the point of connection to the process line, remove the inner polyethylene bag from the mass flow
controller and inspect the unit for any signs of damage during transportation or handling.
Caution Only qualified individuals should perform the product installation and configuration.
Individuals must comply with all necessary ESD handling precautions while installing
and adjusting the instrument. Proper handling is essential when working with all highly
sensitive precision electronic instruments.
Verifying Use Requirements Prior to Installation
Follow the guidelines listed below when installing and using the IE500A / IE1000A High Flow Rate Mass
Flow Controller.

Maintain adequate ventilation space around the MFC to provide sufficient air circulation for internal
heat removal. Allow 0.50” around all surfaces of the device (except base)

Maintain an ambient operating temperature between 10° and 50° C (50° to 122° F)